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Optomechanical Engineering 2023最新文献

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Alignment strategy of an NA 0.8 Deep UV objective system for semiconductor defect inspection 用于半导体缺陷检测的na0.8深紫外物镜系统对准策略
Optomechanical Engineering 2023 Pub Date : 2023-10-06 DOI: 10.1117/12.2676602
Yunjong Kim, Young-Soo Kim, Dong-Kyun Kim, Hyun-il Cho
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引用次数: 0
Monolithic duplex layer aluminum mirror structure for low surface sag error 整体双层铝镜结构，表面凹陷误差小
Optomechanical Engineering 2023 Pub Date : 2023-10-06 DOI: 10.1117/12.2676691
Jimin Han, Joong kyu Ham, Geon Hee Kim, B. Moon, Dae-hee Lee, S. Pak
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引用次数: 0
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