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Proposed for presentation at the American Vacuum Society 67th International Symposium & Exhibition in ,最新文献

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Particle-in-cell modeling of low pressure, high voltage capacitively coupled Ar plasmas. 低压、高压电容耦合氩等离子体的细胞内粒子模型。
Proposed for presentation at the American Vacuum Society 67th International Symposium & Exhibition in , Pub Date : 2021-10-01 DOI: 10.2172/1892454
A. Lietz, Peng Tian, J. Kenney, S. Rauf, M. Hopkins
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