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Particle-in-cell modeling of low pressure, high voltage capacitively coupled Ar plasmas.

Proposed for presentation at the American Vacuum Society 67th International Symposium & Exhibition in , Pub Date : 2021-10-01 DOI:10.2172/1892454
A. Lietz, Peng Tian, J. Kenney, S. Rauf, M. Hopkins
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低压、高压电容耦合氩等离子体的细胞内粒子模型。
本文章由计算机程序翻译，如有差异，请以英文原文为准。
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Proposed for presentation at the American Vacuum Society 67th International Symposium & Exhibition in ,
Proposed for presentation at the American Vacuum Society 67th International Symposium & Exhibition in ,
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