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Short-Wavelength Coherent Radiation: Generation and Application最新文献

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Proximity X-ray Nanolithography 近距离x射线纳米光刻
Short-Wavelength Coherent Radiation: Generation and Application Pub Date : 1992-05-22 DOI: 10.1364/swcr.1991.wd3
Henry I. Smith, M. Schattenburg
{"title":"Proximity X-ray Nanolithography","authors":"Henry I. Smith, M. Schattenburg","doi":"10.1364/swcr.1991.wd3","DOIUrl":"https://doi.org/10.1364/swcr.1991.wd3","url":null,"abstract":"The use of x-ray lithography in the fabrication of integrated electronics at 0.5 μm minimum feature sizes, and its extension to 0.1 μm features, is well documented in the technical and popular literature. The primary advantage of x-ray relative to optical-projection lithography in the 0.5 to 0.25 μm range is process latitude, which follows from a high contrast aerial image and absence of coherent scattering (e.g., standing waves). The potential of x-ray lithography in the nanometer domain (i.e., sub-100 nm features) has been appreciated since the late 70's when 18 nm lines and spaces were demonstrated by Flanders [1]. Over the past 5 years, a concerted effort to develop a reliable, manufacturing-compatible technology for sub-100 nm lithography has been persued at MIT; our motivation being the eventual manufacture of quantum-effect electronic systems. A number of options were considered. Our results indicate that x-ray nanolithography using 1 to 1 masks will meet all the needs of manufacturing down to 50 nm features, and probably also from 50 down to 10 nm. The techniques of x-ray nanolithography will be reviewed and the factors that limit resolution and drive mask architecture described.","PeriodicalId":286766,"journal":{"name":"Short-Wavelength Coherent Radiation: Generation and Application","volume":"26 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1992-05-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125936149","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Longitudinal pumping by an ellipsoidal reflector for short-wavelength lasers 短波长激光器中椭球面反射器的纵向泵浦
Short-Wavelength Coherent Radiation: Generation and Application Pub Date : 1992-05-22 DOI: 10.1364/swcr.1991.wa10
K. Midorikawa, H. Tashiro, T. Watabe, M. Obara
{"title":"Longitudinal pumping by an ellipsoidal reflector for short-wavelength lasers","authors":"K. Midorikawa, H. Tashiro, T. Watabe, M. Obara","doi":"10.1364/swcr.1991.wa10","DOIUrl":"https://doi.org/10.1364/swcr.1991.wa10","url":null,"abstract":"We have designed and tested an ellipsoidal reflector to pump short-wavelength lasers by soft x-ray radiation from laser produced plasma. A gaseous medium supplied by a slit nozzle was pumped longitudinally along the optical axis in the region of the second focus. Soft x-ray absorption and VUV emission of gaseous medium have been investigated.","PeriodicalId":286766,"journal":{"name":"Short-Wavelength Coherent Radiation: Generation and Application","volume":"20 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1992-05-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125967734","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Nonlinear Compton Scattering in a Pulsed Focused Laser Beam 脉冲聚焦激光束中的非线性康普顿散射
Short-Wavelength Coherent Radiation: Generation and Application Pub Date : 1992-05-22 DOI: 10.1364/swcr.1991.tub2
U. Mohideen, H. Tom, R. Freeman, J. Bokor, P. Bucksbaum
{"title":"Nonlinear Compton Scattering in a Pulsed Focused Laser Beam","authors":"U. Mohideen, H. Tom, R. Freeman, J. Bokor, P. Bucksbaum","doi":"10.1364/swcr.1991.tub2","DOIUrl":"https://doi.org/10.1364/swcr.1991.tub2","url":null,"abstract":"We have calculated the radiation emitted from free electrons in an ultrashort pulsed laser focus. For low electron densities, where space charge is negligible, we find that ponderomotive forces limit the effective volume where the radiation is emitted to a region much smaller than the waist at the focus. For typical focal parameters, the emitting region is significantly smaller than the fundamental wavelength. Nonetheless, constructive inteference plays a significant role in the collective radiation spectrum. Phase mismatch becomes important only for the higher harmonics. These studies are intended as a prelude to experiments with high intensity ultrashort laser pulses.","PeriodicalId":286766,"journal":{"name":"Short-Wavelength Coherent Radiation: Generation and Application","volume":"47 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1992-05-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122972983","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Recombination Lasers Pumped by Multi-Photon Ionization 多光子电离泵浦复合激光器
Short-Wavelength Coherent Radiation: Generation and Application Pub Date : 1992-05-22 DOI: 10.1364/swcr.1991.tuc3
N. Burnett, F. Brunel, P. Corkum, G. Enright, C. Capjack
{"title":"Recombination Lasers Pumped by Multi-Photon Ionization","authors":"N. Burnett, F. Brunel, P. Corkum, G. Enright, C. Capjack","doi":"10.1364/swcr.1991.tuc3","DOIUrl":"https://doi.org/10.1364/swcr.1991.tuc3","url":null,"abstract":"Recent advances in ultra-short pulse visible and uv laser technology make it practical for the first time to consider the production of multiply ionized laboratory plasmas in which ionization is moderated by an external optical field rather than by electron collisions. Such plasmas will be remarkable for the high degree of disequilibrium that can be achieved between the distribution of ionization and the electron energy distribution. In particular it should be possible to produce plasmas in which the electron energy distribution is much cooler (either locally or over a distance comparable to an electron mean free path) than the ionization temperature. This leads naturally to consideration of the use of these plasmas for short wavelength recombination lasers.","PeriodicalId":286766,"journal":{"name":"Short-Wavelength Coherent Radiation: Generation and Application","volume":"19 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1992-05-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124588027","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Effects of Illumination Uniformity Improvement on X-ray Lasing Plasma 提高x射线激光等离子体照度均匀性的影响
Short-Wavelength Coherent Radiation: Generation and Application Pub Date : 1992-05-22 DOI: 10.1364/swcr.1991.wa13
J. Kieffer, M. Nantel, M. Chaker, H. Pépin, H. Baldis
{"title":"Effects of Illumination Uniformity Improvement on X-ray Lasing Plasma","authors":"J. Kieffer, M. Nantel, M. Chaker, H. Pépin, H. Baldis","doi":"10.1364/swcr.1991.wa13","DOIUrl":"https://doi.org/10.1364/swcr.1991.wa13","url":null,"abstract":"An accurate knowledge and an efficient control of the plasma conditions are required for the optimization of the gain to realize a small scale efficient X-ray laser1. We already observed that large scale density inhomogeneities were driven by laser nonuniform irradiation2. In the present work a novel focusing arrangement3, composed of a segmented wedge array (SWA) to overlap several line foci, was employed to produce a nearly uniform illumination. We use simultaneously spatially (2D) and time resolved diagnostic to see, in lasing plasmas, how critical is the irradiation nonuniformity, for various pumping schemes.","PeriodicalId":286766,"journal":{"name":"Short-Wavelength Coherent Radiation: Generation and Application","volume":"124 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1992-05-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133168931","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Coulomb Explosions of Molecular Iodine With Ultrashort Pulses 分子碘的超短脉冲库仑爆炸
Short-Wavelength Coherent Radiation: Generation and Application Pub Date : 1992-05-22 DOI: 10.1364/swcr.1991.mb3
Y. Beaudoin, D. Strickland, P. Corkum
{"title":"Coulomb Explosions of Molecular Iodine With Ultrashort Pulses","authors":"Y. Beaudoin, D. Strickland, P. Corkum","doi":"10.1364/swcr.1991.mb3","DOIUrl":"https://doi.org/10.1364/swcr.1991.mb3","url":null,"abstract":"Femtosecond pulses offer the possibility of producing and studying highly transient molecular species. We report the formation of highly charged molecules that are nearly instantly produced with a nuclear separation of the uncharged precursor. We have chosen iodine since the atoms are massive, the vibrational period in the ground electronic state is low, and the equilibrium internuclear separation is large.","PeriodicalId":286766,"journal":{"name":"Short-Wavelength Coherent Radiation: Generation and Application","volume":"59 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1992-05-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134422717","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Designs for Coherent X-Ray Lasers 相干x射线激光器的设计
Short-Wavelength Coherent Radiation: Generation and Application Pub Date : 1992-05-22 DOI: 10.1364/swcr.1991.wa11
R. London, P. Amendt, M. R. Carter, M. Feit, J. Fleck
{"title":"Designs for Coherent X-Ray Lasers","authors":"R. London, P. Amendt, M. R. Carter, M. Feit, J. Fleck","doi":"10.1364/swcr.1991.wa11","DOIUrl":"https://doi.org/10.1364/swcr.1991.wa11","url":null,"abstract":"The property of coherence is important for many suggested applications of x-ray lasers. For x-ray holography, the longitudinal coherence length is required to be larger than the pathlength difference between the object beam and the reference beam, estimated to be about 5 µm in a Fourier transform holography system. The longitudinal coherence length is related to the line width by Lℓ = λ2/Δλ, where λ is the laser wavelength. Using the thermal Doppler width for an estimate we get Lℓ = 37 µm for a 45Å laser. This estimate is supported by a measurement at 206Å. We therefore expect that longitudinal coherence will not be a problem. The transverse coherence length must be larger than the extent of the sample, typically ≈ 10 µm, and a certain amount of energy must irradiate the sample in order provide a high signal to noise hologram. The coherence length is obtainable straightforwardly by placing a pinhole in front of the laser, or by placing the object far from the laser. The combined requirement of energy and coherence is, however, much more difficult, requiring efficient production of coherent radiation.","PeriodicalId":286766,"journal":{"name":"Short-Wavelength Coherent Radiation: Generation and Application","volume":"15 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1992-05-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122950997","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
High Damage Threshold Gratings using Coated Silicon Substrates. 使用涂层硅衬底的高损伤阈值光栅。
Short-Wavelength Coherent Radiation: Generation and Application Pub Date : 1992-05-22 DOI: 10.1364/swcr.1991.tua12
H. Tom, M. Sher, O. Wood, W. Mansfield
{"title":"High Damage Threshold Gratings using Coated Silicon Substrates.","authors":"H. Tom, M. Sher, O. Wood, W. Mansfield","doi":"10.1364/swcr.1991.tua12","DOIUrl":"https://doi.org/10.1364/swcr.1991.tua12","url":null,"abstract":"We are currently investigating the manufacture of high damage threshold gratings using a novel idea. We are placing high reflectivity coatings on holographically patterned Silicon grating blanks. This approach provides four principle advantages compared to current gratings made by placing a thin metallic layer over holographically patterned photoresist on glass substrates. First, groove shapes can be optimized because lithographic and etching techniques for Si can make almost any arbitrary profile while retaining holographic registry across large surfaces. Second, photoresist which damages at 100-200° C is replaced with metal-silicide or silicon with much higher damage thresholds. Third, Si efficiently conducts heat away from the surface whereas the glass substrates prevent cooling. Fourth, enhanced metallic and dielectric coatings, which can be made nearly 99% reflecting, can be used when the groove profile is blazed with flat surfaces (ie., triangular groove). These four advantages make us believe damage thresholds comparable to those of bulk metals (~ 300 mJ/cm2) are obtainable.","PeriodicalId":286766,"journal":{"name":"Short-Wavelength Coherent Radiation: Generation and Application","volume":"7 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1992-05-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129939440","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
X-ray Generation by High Irradiance Subpicosecond Lasers 高辐照度亚皮秒激光产生x射线
Short-Wavelength Coherent Radiation: Generation and Application Pub Date : 1992-05-04 DOI: 10.1063/1.107077
G. Kyrala, R. Fulton, E. Wåhlin, L. Jones, G. Schappert, J. Cobble, A. Taylor
{"title":"X-ray Generation by High Irradiance Subpicosecond Lasers","authors":"G. Kyrala, R. Fulton, E. Wåhlin, L. Jones, G. Schappert, J. Cobble, A. Taylor","doi":"10.1063/1.107077","DOIUrl":"https://doi.org/10.1063/1.107077","url":null,"abstract":"The pumping of short wavelength x-ray lasers requires very large power. The most widely used method for recombination schemes utilizes direct heating of the lasant with laser irradiation followed by relaxation to the desired levels. We prefer to use selected x-ray lines to pump the x-ray laser in a manner similar to dye lasers. This selective method reduces the x-ray pump energy requirements as well as the extraneous heating that accompanies the pumping, but requires high irradiance. We have been studying the generation of intense x-ray pulses using the interaction of a subpicosecond uv laser pulses with appropriate solid targets.","PeriodicalId":286766,"journal":{"name":"Short-Wavelength Coherent Radiation: Generation and Application","volume":"27 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1992-05-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125965099","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 41
Temperature Determination in X-ray Laser Plasmas by Thomson Scattering 用汤姆逊散射法测定x射线激光等离子体的温度
Short-Wavelength Coherent Radiation: Generation and Application Pub Date : 1992-02-10 DOI: 10.1364/swcr.1991.tud2
D. Villeneuve, B. L. Fontaine, H. Baldis, J. Dunn, G. Enright, Rosén, P. Young, D. Matthews
{"title":"Temperature Determination in X-ray Laser Plasmas by Thomson Scattering","authors":"D. Villeneuve, B. L. Fontaine, H. Baldis, J. Dunn, G. Enright, Rosén, P. Young, D. Matthews","doi":"10.1364/swcr.1991.tud2","DOIUrl":"https://doi.org/10.1364/swcr.1991.tud2","url":null,"abstract":"One of the outstanding uncertainties in modelling x-ray laser experiments lies in determining the actual plasma parameters which crucially affect the prediction of laser performance. Electron temperatures are commonly inferred experimentally from x-ray emission spectra or from the Landau damping cutoff of stimulated Raman scattering, neither of which directly measures the temperature with sufficient precision at the location where lasing occurs.","PeriodicalId":286766,"journal":{"name":"Short-Wavelength Coherent Radiation: Generation and Application","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1992-02-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130206639","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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