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Proposed for presentation at the 21st International Conference on Atomic Layer Deposition held June 27-30, 2021 in Virtual,最新文献

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Atomic Precision Advanced Manufacturing and Lessons for Area-Selective Deposition. 原子精密先进制造和区域选择性沉积的经验教训。
Proposed for presentation at the 21st International Conference on Atomic Layer Deposition held June 27-30, 2021 in Virtual, Pub Date : 2021-06-01 DOI: 10.2172/1877517
S. Schmucker, E. Frederick, Q. Campbell, J. Ivie, E. Anderson, K. Dwyer, A. Baczewski, George Wang, R. Butera, S. Misra
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