原子精密先进制造和区域选择性沉积的经验教训。

{"title":"原子精密先进制造和区域选择性沉积的经验教训。","authors":"S. Schmucker, E. Frederick, Q. Campbell, J. Ivie, E. Anderson, K. Dwyer, A. Baczewski, George Wang, R. Butera, S. Misra","doi":"10.2172/1877517","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":256346,"journal":{"name":"Proposed for presentation at the 21st International Conference on Atomic Layer Deposition held June 27-30, 2021 in Virtual,","volume":"4 4","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2021-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Atomic Precision Advanced Manufacturing and Lessons for Area-Selective Deposition.\",\"authors\":\"S. Schmucker, E. Frederick, Q. Campbell, J. Ivie, E. Anderson, K. Dwyer, A. Baczewski, George Wang, R. Butera, S. Misra\",\"doi\":\"10.2172/1877517\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":256346,\"journal\":{\"name\":\"Proposed for presentation at the 21st International Conference on Atomic Layer Deposition held June 27-30, 2021 in Virtual,\",\"volume\":\"4 4\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2021-06-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Proposed for presentation at the 21st International Conference on Atomic Layer Deposition held June 27-30, 2021 in Virtual,\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.2172/1877517\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proposed for presentation at the 21st International Conference on Atomic Layer Deposition held June 27-30, 2021 in Virtual,","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.2172/1877517","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}