Laser-based Micro- and Nanoprocessing XIII最新文献

Laser-based Micro- and Nanoprocessing XIII Pub Date : 2019-05-24 DOI: 10.1117/12.2531405

引用次数: 0

Nonlinear feedback-driven laser-material interactions (Conference Presentation) 非线性反馈驱动的激光-材料相互作用(会议报告)

Laser-based Micro- and Nanoprocessing XIII Pub Date : 2019-03-13 DOI: 10.1117/12.2515785

F. Ilday

引用次数: 0

Three-dimensional microfabrication using spatiotemporal shaped femtosecond laser pulses (Conference Presentation) 利用时空形飞秒激光脉冲进行三维微加工(会议报告)

Laser-based Micro- and Nanoprocessing XIII Pub Date : 2019-03-04 DOI: 10.1117/12.2505724

W. Chu, Ya Cheng

{"title":"Three-dimensional microfabrication using spatiotemporal shaped femtosecond laser pulses (Conference Presentation)","authors":"W. Chu, Ya Cheng","doi":"10.1117/12.2505724","DOIUrl":"https://doi.org/10.1117/12.2505724","url":null,"abstract":"We present a method based on simultaneous spatiotemporal focusing (SSTF) of the femtosecond laser pulses that enables to fabricate 3D structures on the centimeter scale. The isotropic spatial resolutions of fabrication have been achieved in different materials, making this approach easy to implement. For example, applying simultaneous spatiotemporal focusing (SSTF) of femtosecond laser pulses in two-photon polymerization (TPP) (i.e., termed as SSTF-TPP hereafter) uniquely allows for producing centimeter-scale 3D structures at a spatial resolution as high as ~10 μm. The fabrication resolution can be tuned simply by varying the power of femtosecond laser. The capacity of this SSTF-TPP method is confirmed by fabricating complex 3D structures such as Chinese guardian lions and a Terra Cotta Warrior. In addition, based on the SSTF scheme, we demonstrate 3D microprocessing in glass with a nearly invariant spatial resolution for a large range of penetration depth without any aberration correction. The SSTF technique can be useful for a broad range of superfine 3D printing applications such as micro-electromechanical systems (MEMS), infrared or Terahertz photonics, microfluidics, and 3D bio-printing.","PeriodicalId":247282,"journal":{"name":"Laser-based Micro- and Nanoprocessing XIII","volume":"32 1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-03-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125613232","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

High aspect ratio nanochannel drilling in glass by femtosecond laser pulse of high cone angle, high quality Bessel-Gauss beam (Conference Presentation) 利用高锥角飞秒激光脉冲、高质量贝塞尔-高斯光束在玻璃上钻制高纵横比纳米通道(会议报告)

Laser-based Micro- and Nanoprocessing XIII Pub Date : 2019-03-04 DOI: 10.1117/12.2511295

J. Hoyo, P. Boucher, C. Billet, O. Pinel, G. Labroille, F. Courvoisier

{"title":"High aspect ratio nanochannel drilling in glass by femtosecond laser pulse of high cone angle, high quality Bessel-Gauss beam (Conference Presentation)","authors":"J. Hoyo, P. Boucher, C. Billet, O. Pinel, G. Labroille, F. Courvoisier","doi":"10.1117/12.2511295","DOIUrl":"https://doi.org/10.1117/12.2511295","url":null,"abstract":"Bessel beams are invariant solutions to the Helmoltz equation that can also propagate, with finite pulse energy at high intensity, in a quasi-invariant regime in transparent dielectrics. Homogeneous energy is deposited along a line focus by infrared ultrashort pulses. If the cone angle is sufficiently high, the laser-deposited energy density is enough to open nanochannels in glasses or sapphire with a single laser pulse. This has found applications in the field of glass cutting via the technique of \"stealth dicing\".\u0000Here we address two important challenges in this field. First, high quality Bessel beams are essential for controlled energy deposition. Second, the maximal angle used up to here for channel drilling was 26° for 800 nm laser central wavelength. This enabled the formation of channels with diameters down to typically 300 nm in glass and sapphire. It is questionable if higher cone angles could also produce channels with potentially smaller diameters.\u0000Here, we generate high quality Bessel-Gauss beams with a setup based on reflective, off-axis axicons. The Bessel zone exceeds 100 µm for cone angles up to 35 degrees. This corresponds to central spot diameter down to 0.5 µm FWHM. We qualified these beams with a 100 fs laser source centered at 800 nm wavelength. We report nanochannel drilling down to typically 100 nm over at least 30 µm length in glass. \u0000Our approach opens novel perspectives for high quality Bessel beam generation but also for the highly confined laser-matter interaction for high precision processing of transparent dielectrics.","PeriodicalId":247282,"journal":{"name":"Laser-based Micro- and Nanoprocessing XIII","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-03-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131155633","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Complete time-resolved optical properties and ablation dynamics of metals after ultrashort pulsed laser irradiation (Conference Presentation) 超短脉冲激光辐照后金属的完全时间分辨光学特性和烧蚀动力学(会议报告)

Laser-based Micro- and Nanoprocessing XIII Pub Date : 2019-03-04 DOI: 10.1117/12.2514027

C. McDonnell, J. Winter, Maximilian Spellauge, S. Rapp, Michael Schmidt, H. Huber

{"title":"Complete time-resolved optical properties and ablation dynamics of metals after ultrashort pulsed laser irradiation (Conference Presentation)","authors":"C. McDonnell, J. Winter, Maximilian Spellauge, S. Rapp, Michael Schmidt, H. Huber","doi":"10.1117/12.2514027","DOIUrl":"https://doi.org/10.1117/12.2514027","url":null,"abstract":"Ultrashort lasers have gained widespread use for both scientific and industrial applications due to their highly efficient and precise material ablation properties. In order to optimise the interaction between the ultrafast laser source and the target an in-depth understanding of the optical and ablation dynamics is required. Here we present a study of the complete ablation dynamics ablation properties of the three most relevant metals (Copper, Aluminium and Stainless Steel) after ultrashort laser pulses for the first time. This is achieved through a temporal analysis of the change in the optical properties after laser irradiation using pump-probe ellipsometry and pump-probe microscopy. The complex refractive index change in the first 50 ps after laser irradiation is analysed with a 1 ps resolution using pump-probe ellipsometry. The results show a large decrease in the extinction coefficient k for all the analysed metals in the first few ps after the pulse impact. This indicates an early stage decrease in the material density due to unloading of the pressure buildup generated by the stress confinement state in the metal skin depth. This pressure buildup and density decrease results in phase change and material motion at time scales from 100 ps to 1 ns, which can be visualised with pump-probe microscopy. Depending on the metal, ablation mechanisms such as spallation and phase explosion can be visualised and followed into the equilibrium state at about 10 µs. The effects of the early stage dynamics can be used to describe ablation efficiency trends observed for double and pulse bursts of various inter-pulse delay times.","PeriodicalId":247282,"journal":{"name":"Laser-based Micro- and Nanoprocessing XIII","volume":"163 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-03-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121030416","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Picosecond laser welding of glass with large gap (Conference Presentation) 皮秒激光焊接大间隙玻璃(会议介绍)

Laser-based Micro- and Nanoprocessing XIII Pub Date : 2019-03-04 DOI: 10.1117/12.2522963

Chen Hang, J. Duan, Xiaoyan Zeng

引用次数: 0

Textured titanium implants: how to reduce risk and manufacturing cost through the use of lasers 纹理钛植入物:如何通过使用激光降低风险和制造成本

Laser-based Micro- and Nanoprocessing XIII Pub Date : 2019-03-04 DOI: 10.1117/12.2508450

Jon Carlson, E. Poulsen

引用次数: 0

Pulse-by-pulse surface structure evolution during multiple-pulse femtosecond laser ablation (Conference Presentation) 多脉冲飞秒激光消融过程中脉冲-脉冲表面结构演变(会议报告)

Laser-based Micro- and Nanoprocessing XIII Pub Date : 2019-03-04 DOI: 10.1117/12.2506147

S. Tani, Y. Kobayashi

引用次数: 0

Femtosecond laser fabrication of ultrahigh Q lithium niobate microresonators (Conference Presentation) 飞秒激光制备超高Q铌酸锂微谐振器(会议报告)

Laser-based Micro- and Nanoprocessing XIII Pub Date : 2019-03-04 DOI: 10.1117/12.2506072

Rongbo Wu, Jianhao Zhang, Jintian Lin, Ya Cheng

{"title":"Femtosecond laser fabrication of ultrahigh Q lithium niobate microresonators (Conference Presentation)","authors":"Rongbo Wu, Jianhao Zhang, Jintian Lin, Ya Cheng","doi":"10.1117/12.2506072","DOIUrl":"https://doi.org/10.1117/12.2506072","url":null,"abstract":"The realization of micro-disk resonators (MDRs) of high quality (Q) factors using lithium niobate on insulator (LNOI) as the substrate has spurred great interest in developing on-chip nanophotonic structures which hold the promise for efficient nonlinear wavelength conversion, fast electrooptic light modulation, and high density photonic integration. Here, we report on fabrication of crystalline lithium niobate microresonators with quality factors above 10^7 as measured around 770 nm wavelength, which is almost one order of magnitude higher than the state-of-the-art Q factors around the visible and near-infrared wavelengths reported so far. Our fabrication process includes four steps. First, a thin layer of chromium (Cr) was deposited on the surface of the LNOI by thermal evaporation coating. Subsequently, the Cr film on the LNOI sample was patterned into a circular disk using space-selective femtosecond laser direct writing. Next, the chemo-mechanical (CM) polishing process was performed to fabricate LN MDRs by a wafer polishing machine, the surface smoothness is greatly improved by the CM polishing process, leading to a significant increase of the Q factor. Finally, the fabricated structure was first immersed in Cr etching solution, and then underwent a chemical wet etching in a buffered hydrofluoric acid (HF) solution to partially remove the SiO_2 layer beneath the LN microdisk to produce the freestanding LN MDRs. We have also demonstrated nonlinear processes including second harmonic generation and Raman scattering in our LN MDRs.","PeriodicalId":247282,"journal":{"name":"Laser-based Micro- and Nanoprocessing XIII","volume":"9 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-03-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127524954","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Roll-to-roll hot embossing process: A way to scale up the fabrication speed of micro-nano structures formed by direct laser interference patterning (Conference Presentation) 卷对卷热压印工艺:一种提高直接激光干涉图案形成的微纳结构制造速度的方法(会议报告)

Laser-based Micro- and Nanoprocessing XIII Pub Date : 2019-03-04 DOI: 10.1117/12.2509386

A. Rank, V. Lang, B. Voisiat, A. Lasagni

{"title":"Roll-to-roll hot embossing process: A way to scale up the fabrication speed of micro-nano structures formed by direct laser interference patterning (Conference Presentation)","authors":"A. Rank, V. Lang, B. Voisiat, A. Lasagni","doi":"10.1117/12.2509386","DOIUrl":"https://doi.org/10.1117/12.2509386","url":null,"abstract":"Surface structuring has attracted great attention due to the rising need of the industrial sector to improve their products through surface functionalization. A very promising technology for this purpose is Direct Laser Interference Patterning, which implements interference of multiple beams to directly form periodical patterns with a single laser pulse. This provides the ability to utilize the whole laser power for high speed structuring of large surface areas. However, in some cases even higher speeds are required. Therefore, alternative technologies like roll-to-roll hot embossing must be utilized. By the synergy of the DLIP technology, which is used for structuring the sleeves (embossing tool) and the roll-to-roll hot-embossing method, the throughput for the fabrication of micro/nano structured polymer foils can be increased at least one order of magnitude. Furthermore, since the sleeves are processed directly, without the need of lithographic methods, the fabrication cost of the textured sleeves can be significantly reduced (up to ~ 90%).\u0000In this study, a unique DLIP-workstation is introduced, consisting of a ps-laser, several DLIP optics and a special positioning system for cylindrical parts. The system allows the patterning of cylindrical parts up to 600 mm in length and 300 mm in diameter. The structures, consisting of line-like or dot-like patterns with periods ranging from 5.5 µm down to 1.0 µm, can be produced with record processing speeds up to 5700 mm²/min. Finally, the implementation of these structured sleeves in a roll-to-roll system is demonstrated for imprinting polymer foils at an impressive surface throughputs of 12.5 m²/min, corresponding to web-speeds of 50 m/min. Additionally, some examples of the decorative elements processed by these technique are presented.","PeriodicalId":247282,"journal":{"name":"Laser-based Micro- and Nanoprocessing XIII","volume":"48 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-03-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121025025","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 2