The 5th European Microwave Integrated Circuits Conference最新文献

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150 nm copper metalized GaAs pHEMT with Cu/Ge ohmic contacts 150nm铜金属化GaAs pHEMT与Cu/Ge欧姆触点
The 5th European Microwave Integrated Circuits Conference Pub Date : 2010-10-28 DOI: 10.1155/2012/418264
E. Anichenko, V. Arykov, E. Erofeev, V. Kagadei
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引用次数: 9
Multilayer low-resistance Ge/Au/Ni/Ti/Au based ohmic contact to n-GaAs 多层低阻Ge/Au/Ni/Ti/Au基欧姆接触n-GaAs
The 5th European Microwave Integrated Circuits Conference Pub Date : 2009-10-23 DOI: 10.1117/12.853581
E. Erofeev, S. Ishutkin, V. Kagadei, K. S. Nosaeva
{"title":"Multilayer low-resistance Ge/Au/Ni/Ti/Au based ohmic contact to n-GaAs","authors":"E. Erofeev, S. Ishutkin, V. Kagadei, K. S. Nosaeva","doi":"10.1117/12.853581","DOIUrl":"https://doi.org/10.1117/12.853581","url":null,"abstract":"The work investigates the influence of the mode and conditions for deposition of a Ti thin film on the specific contact resistance and thermal stability of Ge/Au/Ni/Ti/Au based ohmic contacts to n-GaAs. Deposition techniques of a Ti diffusion barrier were developed in which a fifty-fold reduction in specific contact resistance was observed, and also an increase in the thermal stability of the sidewalls morphology on the edge of the contact pads. The factors influencing the specific contact resistance are: the angle at which the titanium atoms impact on the GaAs surface, the rate of deposition of the Ti film, and also the residual pressure during deposition. The factor which has an influence on the thermal stability of the sidewalls morphology of the contact pads appears to be the angle of incidence of the Ti atoms.","PeriodicalId":227958,"journal":{"name":"The 5th European Microwave Integrated Circuits Conference","volume":"34 4 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-10-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116593213","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
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