Surface Topography: Metrology and Properties最新文献

{"title":"Effects of argon plasma pretreatment of Si wafers on Si-Si bonding based on Mo/Au interlayers","authors":"Y. Qu, H. Bai, Wenbo Hu, Yuan Yuan, Shengli Wu, Hong Wang, H. Fan","doi":"10.1088/2051-672X/acd569","DOIUrl":"https://doi.org/10.1088/2051-672X/acd569","url":null,"abstract":"To improve the bonding quality of Si-Si wafers bonded based on Mo/Au intermediate layers at room temperature, the surfaces of Si wafers were pretreated with argon plasma, and the effect of argon plasma pretreatment on Si-Si wafer bonding was analyzed by combining experimental and theoretical methods. Owing to the plasma treatment of Si wafers, the surface roughness of Si wafers was significantly reduced, and the bonded Si-Si samples had lower interfacial voidage. The average bonding strength of 11.46 MPa for the argon plasma pretreated Si-Si bonded samples is much higher than the bonding strength of 4.23 MPa for the unpretreated Si-Si bonded samples. The analysis of the fractured surface revealed that the fracture of the Si-Si bonded samples without argon plasma treatment occurred mainly at the Mo/Si interface, while the fracture of the plasma-treated Si-Si bonded samples arose mainly within the bulk Si. Molecular dynamics (MD) simulations suggest that strong atomic diffusion takes place at the Mo/Au interface, while Mo atoms hardly diffuse into the bulk Si. These results indicate that argon plasma pretreatment not only cleans and activates the Si wafer surface but also makes the Si wafer surface smooth, which helps to enhance the deposited Mo/Au film quality and the adhesion between the Mo film and the Si wafer.","PeriodicalId":22028,"journal":{"name":"Surface Topography: Metrology and Properties","volume":"13 1","pages":""},"PeriodicalIF":2.7,"publicationDate":"2023-05-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"74113044","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"The investigation of wear properties of nanoparticle-reinforced epoxy composite material surfaces","authors":"Serkan Apay, M. Kılınçel","doi":"10.1088/2051-672X/acd4d4","DOIUrl":"https://doi.org/10.1088/2051-672X/acd4d4","url":null,"abstract":"This study added nano-sized Al2O3, Boron, and TiO2 powders to the epoxy polymer at 0.5% and 1% ratios. Abrasive wear resistance properties of nanoparticle-reinforced epoxy polymers were investigated. First cylindrical specimens with and without additives were prepared for realizing the experimental research. Pin-on discs were used for the wear test of epoxy samples. The mass losses were measured via a precision scale. According to the results, the boron nanoparticles have increased the epoxy specimens’ resistance. As a result of the experimental studies, it was observed that the wear resistance of the epoxy composite increased with each nano-sized powder added to the epoxy. SEM and optical profilometry investigated the composites’ friction coefficient and surface morphology. As a result of friction coefficient and wear weight loss tests, the highest wear resistance was obtained in 1% boron powder nano-reinforced epoxy composites. It was observed that the epoxy friction coefficient was in the range of 0.4–0.6, which decreased to the range of 0.2–0.4 with the addition of nano boron. The surface roughness value after epoxy wear was measured as 1.4 μm. With the addition of nano boron, this value was measured as 0.32 μm. Optical profilometry and SEM imaging results also support these values.","PeriodicalId":22028,"journal":{"name":"Surface Topography: Metrology and Properties","volume":"86 1","pages":""},"PeriodicalIF":2.7,"publicationDate":"2023-05-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"81308000","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Improvement of lubrication performance of sliding pairs with multi-depth groove textures based on genetic algorithm","authors":"Shaojun Li, Zhenpeng Wu, B. Dong, Wenyan Luo, Hailong Song, Haotian Guo, And Qiqi Zhou","doi":"10.1088/2051-672X/acd46a","DOIUrl":"https://doi.org/10.1088/2051-672X/acd46a","url":null,"abstract":"During the wear and tear process of bearings, the friction coefficient between the friction pairs can be effectively decreased by employing the suitable surface texture on the frition surface. In the study, the distribution and depth variation of the surface texture were used as variables, and the genetic algorithm was used for iterative optimization to obtain the optimal texture distribution and depth. The friction and wear performance of the rectangular texture bearing sliding blocks was optimized. The depth of the texture was represented by a 4-bit binary number, and different binary numbers were set to represent different texture depths. Finally, the genetic algorithm was used for continuous iteration and evolution to obtain the optimal texture combination. The study showed that, compared with the regular texture with a depth of 0.2 μm, the friction coefficient decreased by 15.0% under the optimal texture with a non-uniform depth. Simultaneously, compared with the regular 3 μm deep texture, texture with a optimized depth makes the friction coefficient decreased by 37.5%, and the minimum oil film thickness increased by 0.979 μm. The optimal texture and oil film thickness combination obtained from the study can effectively reduce solid contact force and alleviate mechanical wear.","PeriodicalId":22028,"journal":{"name":"Surface Topography: Metrology and Properties","volume":"11 1","pages":""},"PeriodicalIF":2.7,"publicationDate":"2023-05-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"79404350","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Statistically representative estimators of multi-scale surface topography: example of aluminum blasted rough samples","authors":"C. Turbil, J. Cabrero, I. Simonsen, D. Vandembroucq, I. Gozhyk","doi":"10.1088/2051-672X/acd469","DOIUrl":"https://doi.org/10.1088/2051-672X/acd469","url":null,"abstract":"The topography of a rough surface determines many of its physical properties, for instance, tribology, contact mechanics, optical properties etc. Nowadays, a deep understanding of such physical phenomena requires the knowledge of the topography at appropriate length scales. Apart from performing multi-scale measurements of the surface topography, it also requires the use of proper statistical estimators for the analysis of such topography maps. Moreover, when dealing with light scattering in the visible spectral range, the scale at which the estimators of local topography properties are defined is extremely important. Here we present a multi-scale and statistical study of the surface topography of blasted aluminum samples which all have rather different visual appearance. Various statistical estimators of surface topography are examined, including estimators related to the height distribution, the lateral correlation and local topology. The combination of these various estimators unveils a scale separation between a micro-scale roughness inherited from the initial cold-rolled aluminum surface and a large scale roughness fully controlled by the blasting process. A special emphasis is given to the crucial importance of length scales in the estimation of local slopes. The present analysis establishes a quantitative link between the statistical properties of the surface topography and the blasting process used to fabricate the samples.","PeriodicalId":22028,"journal":{"name":"Surface Topography: Metrology and Properties","volume":"7 1","pages":""},"PeriodicalIF":2.7,"publicationDate":"2023-05-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"78927304","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Effect of rare–earth (Ce, La) compounds on the microstructure, mechanical and electrochemical corrosion characteristics of electroplated Ni films","authors":"Haixiang Chen, Kun Wang, Zhanshan Wang","doi":"10.1088/2051-672X/acd2f0","DOIUrl":"https://doi.org/10.1088/2051-672X/acd2f0","url":null,"abstract":"For optimizing the microstructure and performance of Ni–electroplating film, the soluble rare–Earth (RE) compounds CeCl3 or LaCl3 were introduced, which were electrodeposited on Cu substrate by direct current (DC) and pulse current (PC) methods, respectively. The surface characteristics of morphology, composition, and phase of obtained different deposits were investigated, and the relationship between the structure and the performance of internal stress, hardness, and electrochemical responses was discussed. The results show that both RE compounds were conducive to eliminating the surface pits by inhibiting the hydrogen evolution reaction, while did not co–deposit into the Ni film. Moreover, the preferred orientation of Ni (111) crystalline plane was altered into Ni (200) by LaCl3, and its combination with PC–electrodeposition further had a better grain refinement effect than CeCl3. Due to the formation of a relatively dense and fine deposit, the PC–electrodeposited Ni/LaCl3 film exhibited the highest hardness of 320 HV, lowest tensile stress of 55 MPa, and best electrochemical passivation protection, which effectively improved the comprehensive performance of Ni film and demonstrated a good prospect for industrial applications.","PeriodicalId":22028,"journal":{"name":"Surface Topography: Metrology and Properties","volume":"49 1","pages":""},"PeriodicalIF":2.7,"publicationDate":"2023-05-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"82682766","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Tribological behaviour of multi-shape photochemical textured surfaces","authors":"Amirah Basir, S. Liza, K. Fukuda, N. A. Mat Tahir","doi":"10.1088/2051-672X/acd0c6","DOIUrl":"https://doi.org/10.1088/2051-672X/acd0c6","url":null,"abstract":"The purpose of this paper is to investigate the effect of multi-shape photochemical textured (PCT) steel surfaces on tribological performance. The textured surface with specific arrangement was fabricated by photochemical texturing, a common technique implemented in the microelectronic mechanical systems (MEMS) industry. It involves photolithography and chemical etching processes. The multi-shape studied were circle with line (CL) and circle with wavy (CW). Fabricated samples’ surfaces were characterized by using a 3D optical profiler to check the produced texture’s dimension. The effect of six different etching times on the texture’s dimension was observed. Then, only two sizes of both multi-shape textures were considered for tribological characterization. It was conducted by using ball-on-disk tribo-tester under lubricated conditions. The results obtained are compared with the reference untextured (UT) surface. From the results, it is found that appropriate size and shape of texture could lead to good friction reduction and anti-wear behaviour. The smaller size, size A, of CL multi-shape presented a lower friction coefficient compared to size B. However, different size of CW multi-shape has no effect on the friction behaviour. This is believed due to higher area density of CW compared to CL resulting in detrimental effect on friction for both CW’s size. Additionally, CL(size A) textured surface shows improved tribological behaviour compared to UT surface as lower friction coefficient and better wear resistance is obtained. This is maybe due to effective lubricating layer formation, good debris trapping effect and lower contact stress of the CL(size A) textured surface. These beneficial effects were achieved under lubricating condition through an increase in applied load.","PeriodicalId":22028,"journal":{"name":"Surface Topography: Metrology and Properties","volume":"131 1","pages":""},"PeriodicalIF":2.7,"publicationDate":"2023-04-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85649493","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Non-integral model-based scatterometry for CD metrology of single high-aspect-ratio microstructures","authors":"Wei-Hsin Chein, Fu-Sheng Yang, Zih-Ying Fu, Liang-Chia Chen","doi":"10.1088/2051-672X/acd0c5","DOIUrl":"https://doi.org/10.1088/2051-672X/acd0c5","url":null,"abstract":"This article presents an innovative model-based scatterometry method for CD metrology of single high-aspect-ratio (HAR) microstructures, which are increasingly utilized in advanced packaging, especially as vertical interconnects in three-dimensional integrated circuits. The rapidly growing aspect ratio of these HAR structures makes it challenging to monitor their critical dimensions (CD). Furthermore, conventional spectral reflectometry or scatterometry measurements on periodic metrology targets on the scribe lines of the wafer are inadequate in providing a reliable correlation with the in-die structures due to the integral nature of these measurements, which can result in additional measurement errors compared to measuring individual in-die structures. To address these challenges, we propose a novel scatterometry system that can achieve high-precision single-structure measurement of fine-pitch HAR structures with significantly improved light efficiency over conventional optical methods. Our system takes advantage of the high spatial coherence of the supercontinuum laser source and an optical NA-controlled design concept for precise light beam shaping, enabling high spatial resolution and superior light efficiency in measurements. Furthermore, we demonstrate a model-based measurement scheme that uses a virtual optical system for complete characterization of the sample profile. The experimental results show that the proposed system can accurately measure RDL structures with fine nominal spacing as small as 1 μm and an aspect ratio of 3:1 with high fidelity.","PeriodicalId":22028,"journal":{"name":"Surface Topography: Metrology and Properties","volume":"60 1","pages":""},"PeriodicalIF":2.7,"publicationDate":"2023-04-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"84177747","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Effect of surface texture on the tribological behavior of sliding electrical contact interface","authors":"Dongwei Wang, Xiao Chen, Faqiang Li, Bo Wan, Bin Liu, Yang Zhao, Xianguo Qing","doi":"10.1088/2051-672X/acd075","DOIUrl":"https://doi.org/10.1088/2051-672X/acd075","url":null,"abstract":"Two kinds of textured surfaces, i.e. square pit-textured surface (SPTS) and round pit-textured surface (RPTS), are manufactured on the flat specimen surface, respectively. A series of current-carrying tests are carried out to detect the ability of surface texture in affecting the tribological behaviors. Results show that the friction coefficient and friction force of RPTS is the lowest among all the surfaces. Moreover, the RPTS shows the best potential in suppressing the generation of friction-induced vibration (FIV). Although the contact resistance of RPTS is slightly larger than that of other surfaces, the continuity of electrical contact is acceptable. Worn surface analysis is performed to illustrate the different tribological performances of these surfaces. Finite element analysis is also performed to provide reasonable explanation for the test phenomenon.","PeriodicalId":22028,"journal":{"name":"Surface Topography: Metrology and Properties","volume":"1 1","pages":""},"PeriodicalIF":2.7,"publicationDate":"2023-04-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"79477477","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Effects of surface topography through laser texturing on the surface characteristics of zirconia-based dental materials: surface hydrophobicity, antibacterial behavior, and cellular response","authors":"Arash Ghalandarzadeh, M. Ganjali, M. Hosseini","doi":"10.1088/2051-672X/acd076","DOIUrl":"https://doi.org/10.1088/2051-672X/acd076","url":null,"abstract":"The continuous need for high-performance implants that provide significant biological properties has led to extensive research into the topographic patterns of bioceramics in recent years. Their excellent aesthetics, biocompatibility, low plaque affinity, and ability to reproduce a natural-looking appearance have contributed to their success in dentistry. 3 mol% Yttria-stabilized zirconia (3YSZ) is gaining popularity as a material for dental implants due to its excellent mechanical properties and minimal degradation when exposed to body temperature. However, such materials show limited biological and antibacterial performance for dental applications. The purpose of this work was to develop microtopographies on the surface of 3YSZ ceramic by laser ablation technique, in order to improve its biological response and antibacterial behaviors. Two types of microtextures, including micro-grooves and micro-channels geometries were fabricated onto the zirconia ceramics using the laser ablation technique. The effects of different microtextures on the wettability, biological and antibacterial behaviors of 3YSZ ceramics were studied. The results indicate that all of the microstructure patterns are capable of improving the performance of 3YSZ. Wettability is a decisive factor that determines the antibacterial performance of textured zirconia ceramics. The microtextured surfaces all display hydrophobic behavior, thus yielding an effective improvement of antibacterial performance for 3YSZ ceramics. Cell-surface interactions were assessed for 7 days on both zirconia textured surfaces and a nontextured control with pre-osteoblast MC3T3-E1 cells. The obtained results showed the positive influence of textured zirconia surfaces on cell biological response.","PeriodicalId":22028,"journal":{"name":"Surface Topography: Metrology and Properties","volume":"67 1","pages":""},"PeriodicalIF":2.7,"publicationDate":"2023-04-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"84848449","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Development of fused metrology methods for the analysis of hip implant tribology","authors":"Joe Pashley, L. Blunt, P. Bills, R. Racasan","doi":"10.1088/2051-672X/accfb3","DOIUrl":"https://doi.org/10.1088/2051-672X/accfb3","url":null,"abstract":"In order to advance the study of wear phenomena involved in total hip implants a fused metrology system has been designed and constructed. The novel fixture system has been designed and built to facilitate large area surface measurement for hip implant bearing wear. The system allows coordinate measurement machine (CMM) wear map data to be used for precise positional targeting of areal surface metrology using high spatial resolution optical interferometry. The complete measurement process allows Coordinate Measuring Machine measurement and surface metrology datasets to be ‘fused’ thus facilitating carefully positioned wear scar analysis. The fixture utilises two digital rotary stages, in a gimble configuration, to precisely position the bearing component during CMM measurement and surface metrology. To test the effectiveness of the fixture system a cohort of explanted large metal-on-metal (MoM) femoral heads were assessed. Application of the fixture system allowed a set of grouped surface measurements were taken within the wear area, the wear area boundary region, and at unworn locations across the femoral heads. Additionally, a series of stitched surface measurements are taken through the entire wear area and combined into a single surface measurement. The ‘fusion’ method, allowed areas of roughening (or smoothing) to be estimated and overlayed on the corresponding CMM wear map. The developed fixture system allows for better understanding of hip implant performance. Combined with areal surface metrology parameters such as areal average surface roughness Sa, developed surface area ration Sdr and areal surface skewness, Ssk the system could be utilised understand the wear mechanisms for both explanted, in-vitro and in-vivo wear testing and also detailed quality inspection of newly manufactured components. The significance of the system deployment is that wear location and detailed mechanism can be studied simultaneously, thus delivering understanding of typical wear mechanisms and hence the fixture becomes a tool for developing increased implant life through understanding surface interactions.","PeriodicalId":22028,"journal":{"name":"Surface Topography: Metrology and Properties","volume":"12 1","pages":""},"PeriodicalIF":2.7,"publicationDate":"2023-04-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"86055502","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}