{"title":"Three-Dimensional Integration of Semiconductors: Processing, Materials, and Applications","authors":"K. Kondo, M. Kada, Kenji Takahashi","doi":"10.1007/978-3-319-18675-7","DOIUrl":"https://doi.org/10.1007/978-3-319-18675-7","url":null,"abstract":"","PeriodicalId":197693,"journal":{"name":"Three-Dimensional Integration of Semiconductors","volume":"7 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122007312","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}