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2021 IEEE 20th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS)最新文献

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Miniature ToF mass spectrometer with an integrated glow-discharge ion source 集成辉光放电离子源的微型ToF质谱仪
2021 IEEE 20th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS) Pub Date : 2021-12-06 DOI: 10.1109/PowerMEMS54003.2021.9658357
M. Białas, Jakub Jendryka, Jan Sobków, Szymon Zakrent, P. Szyszka, T. Grzebyk
{"title":"Miniature ToF mass spectrometer with an integrated glow-discharge ion source","authors":"M. Białas, Jakub Jendryka, Jan Sobków, Szymon Zakrent, P. Szyszka, T. Grzebyk","doi":"10.1109/PowerMEMS54003.2021.9658357","DOIUrl":"https://doi.org/10.1109/PowerMEMS54003.2021.9658357","url":null,"abstract":"This article presents the concept, realization and first mass spectra obtained in a newly developed MEMS mass spectrometer. This device is made of a series of vertically aligned silicon electrodes stacked in a 3D printed holder: three bottom ones form a glow-discharge ion source, next three are responsible for beam steering and the top one serves as a detector. Special electronic systems were designed to interrupt the ion beam and to record quickly changing current signals. By using the developed spectrometer we were able to detect spectrum of air, showing separated peaks of nitrogen and oxygen, both in molecular and atomic form.","PeriodicalId":165158,"journal":{"name":"2021 IEEE 20th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS)","volume":"16 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-12-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122184184","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
An Efficient Maximum Power Point Tracking Architecture for Weakly Coupled Piezoelectric Harvesters based on the source I–V curve 基于源I-V曲线的弱耦合压电采集器高效最大功率点跟踪架构
2021 IEEE 20th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS) Pub Date : 2021-12-06 DOI: 10.1109/PowerMEMS54003.2021.9658370
Nicolas Decroix, P. Gasnier, A. Badel
{"title":"An Efficient Maximum Power Point Tracking Architecture for Weakly Coupled Piezoelectric Harvesters based on the source I–V curve","authors":"Nicolas Decroix, P. Gasnier, A. Badel","doi":"10.1109/PowerMEMS54003.2021.9658370","DOIUrl":"https://doi.org/10.1109/PowerMEMS54003.2021.9658370","url":null,"abstract":"This paper describes a novel Maximum Power Point Tracking (MPPT) architecture for weakly coupled piezoelectric harvesters. It is based on a new algorithm, called the I–V curve algorithm for Current-Voltage curve. It enables a fast calculation of the optimal electrical loads for different extraction techniques like Standard Energy Harvesting (SEH) and parallel/series Synchronized Switch on Inductor (p/sSSHI) without requiring any open circuit measurement on the piezoelectric harvester. This architecture has been validated thanks to Simulink simulations. Optimal loads are obtained after 1.5 mechanical period and the obtained electrical power is always greater than 90% of the optimal power.","PeriodicalId":165158,"journal":{"name":"2021 IEEE 20th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS)","volume":"67 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-12-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133756054","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Harvesting performance of a planar thermoelectric microgenerator with a compact design 紧凑设计的平面热电微型发电机的收获性能
2021 IEEE 20th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS) Pub Date : 2021-12-06 DOI: 10.1109/PowerMEMS54003.2021.9658361
D. Estrada-Wiese, Jose-Manuel Sojo, M. Salleras, J. Santander, M. Fernández-Regúlez, I. Martin-Fernandez, Á. Morata, L. Fonseca, A. Tarancón
{"title":"Harvesting performance of a planar thermoelectric microgenerator with a compact design","authors":"D. Estrada-Wiese, Jose-Manuel Sojo, M. Salleras, J. Santander, M. Fernández-Regúlez, I. Martin-Fernandez, Á. Morata, L. Fonseca, A. Tarancón","doi":"10.1109/PowerMEMS54003.2021.9658361","DOIUrl":"https://doi.org/10.1109/PowerMEMS54003.2021.9658361","url":null,"abstract":"In Internet of Things (IoT) systems millions of interconnected devices, each with multiple sensors, demand for sustainable and long term autonomous energy sources. Thermoelectricity offers an alternative to primary batteries for powering sensor nodes with energy harvesting solutions like waste heat recovery. In many of these scenarios, small size and large volume technologies are a request. While standard thermoelectric technologies are not viable for such applications due to their incompatibility with miniaturization and the use of scarce and toxic materials, planar thermoelectric microgenerators offer an advantageous solution. By micromachining and nanostructuring silicon, downsizing thermoelectric microgenerators is possible with an environmentally safe and cost effective approach. In the past, single micro-thermocouples based on mature silicon microfabrication technology combined with the integration of Si or SiGe nanowires as thermoelectric material were fabricated in our group producing power densities of several tens of nW/cm2. In this work, we report a new compact design featuring a high integration density of up to 50 series connected micro-thermocouples in a small footprint chip of 0.5 cm2 to increase the generated power. The devices were characterized mimicking a low-grade waste heat environment under natural and forced convection conditions. For an available heat source at 250 °C, power densities of 316 nW/cm2 under natural convection and up to 4.2 μW/cm2 under forced convection conditions have been achieved.","PeriodicalId":165158,"journal":{"name":"2021 IEEE 20th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS)","volume":"25 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-12-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132873742","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Extending Wireless Power Transfer Distance using Electromagnetic Halbach Array 利用电磁哈尔巴赫阵列扩展无线电力传输距离
2021 IEEE 20th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS) Pub Date : 2021-12-06 DOI: 10.1109/PowerMEMS54003.2021.9658393
Tamuno-omie Gogo, Cristina A. Alexandru, D. Zhu
{"title":"Extending Wireless Power Transfer Distance using Electromagnetic Halbach Array","authors":"Tamuno-omie Gogo, Cristina A. Alexandru, D. Zhu","doi":"10.1109/PowerMEMS54003.2021.9658393","DOIUrl":"https://doi.org/10.1109/PowerMEMS54003.2021.9658393","url":null,"abstract":"In this paper, an electromagnetic Halbach array is proposed to extend the wireless power transfer distance. A Halbach array is a special permanent magnets arrangement where one side of the arrangement is stronger, and the other side weaker. The proposed system generates a single-sided AC electromagnetic field using five identical square coils connected in series. With simulation and experimental verification, a single-sided electromagnetic Halbach array for WPT have been designed, and the overall power transfer efficiency (PTE) and power transfer distance have been improved. Experimentally, although the both systems showed high PTE at distance <5 mm, the two-coil system drops below 40% as the proposed system maintained a 40% PTE at maximum distance of 20 mm, which is 4 times greater than the two-coil system. This is a notable improvement in the WPT system.","PeriodicalId":165158,"journal":{"name":"2021 IEEE 20th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS)","volume":"122 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-12-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116607064","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Comparisons of Electromagnetic Transducers for Rotational Energy Harvesting 用于旋转能量收集的电磁换能器的比较
2021 IEEE 20th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS) Pub Date : 2021-12-06 DOI: 10.1109/PowerMEMS54003.2021.9658329
D. Zhu, Tamuno-omie Gogo
{"title":"Comparisons of Electromagnetic Transducers for Rotational Energy Harvesting","authors":"D. Zhu, Tamuno-omie Gogo","doi":"10.1109/PowerMEMS54003.2021.9658329","DOIUrl":"https://doi.org/10.1109/PowerMEMS54003.2021.9658329","url":null,"abstract":"This paper presents comparisons of six electromagnetic transducers for rotational energy harvesting, i.e. vertically alternating, 6-pole vertical Halbach array, 8-pole vertical Halbach array, radially alternating, 4-pole radial Halbach array and 6-pole radial Halbach array. Static magnetic simulation carried out in Maxwell shows that Halbach array is able to enhance the magnetic field strength in specific areas. However, in order to improve the output power of the energy harvester, the pole distance in the magnetic arrangement should also be minimized to increase the magnetic field strength gradient. It was concluded that radially magnetized transducers can reduce the overall volume of the energy harvester while the vertically magnetized transducers have the potential to generate higher output power.","PeriodicalId":165158,"journal":{"name":"2021 IEEE 20th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-12-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130492610","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Exploration of Multi-dimensional Sensing in Human Machine Interactions 人机交互中多维感知的探索
2021 IEEE 20th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS) Pub Date : 2021-12-06 DOI: 10.1109/PowerMEMS54003.2021.9658394
Minglu Zhu, Zhongda Sun, Chengkuo Lee
{"title":"Exploration of Multi-dimensional Sensing in Human Machine Interactions","authors":"Minglu Zhu, Zhongda Sun, Chengkuo Lee","doi":"10.1109/PowerMEMS54003.2021.9658394","DOIUrl":"https://doi.org/10.1109/PowerMEMS54003.2021.9658394","url":null,"abstract":"The advancements of human machine interface (HMI) with diversified sensory systems are essential to the intuitive and dexterous interaction with robotics and virtual world, which greatly affect our industrial, healthcare, and entertainment, etc. The manipulations done by human motions requires the multi-dimensional sensors to detect the complex movements. In this paper, we proposed a grating patterned sensor for both dual directional rotation sensors and tactile sensor which can be integrated into the exoskeleton and robot for motion monitoring. With the aid of the switch, the rotation, twisting, and bending sensing are achieved by the proposed designs with high customizability. The motion of upper limbs of users is projected into the virtual space or applied to control the robotics intuitively.","PeriodicalId":165158,"journal":{"name":"2021 IEEE 20th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS)","volume":"31 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-12-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129657099","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Experimental Analysis of Rotary Freestanding Triboelectric Nanogenerators 旋转独立式摩擦纳米发电机的实验分析
2021 IEEE 20th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS) Pub Date : 2021-12-06 DOI: 10.1109/PowerMEMS54003.2021.9658403
Keenan Chatar, S. Uehara, Hiroki Kojima, A. Miura, T. Yabuki, K. Miyazaki
{"title":"Experimental Analysis of Rotary Freestanding Triboelectric Nanogenerators","authors":"Keenan Chatar, S. Uehara, Hiroki Kojima, A. Miura, T. Yabuki, K. Miyazaki","doi":"10.1109/PowerMEMS54003.2021.9658403","DOIUrl":"https://doi.org/10.1109/PowerMEMS54003.2021.9658403","url":null,"abstract":"In this paper, we design, develop, and test rotary freestanding triboelectric nanogenerators (TENGs) for harvesting energy from mechanical rotation. The objective is characterizing the fundamental processes involved in energy harvesting and obtaining a thorough understanding of the development process for TENG devices. An experimental testbed was built for mounting, testing, and analyzing the TENG electrical characteristics. To test the electrical performance, several versions of TENGs were created with varying design and measurement parameters. We measured the effects of changing the diameter (50, 75, 100mm) and changing the number of blades (4, 8 and 12-blade). We also analyzed the effect of changing RPM, applied torque and electrode materials on the output performance produced. Additionally, we also measured and characterized the performance of thin-film MEMS deposition techniques by depositing an Aluminum Oxide (Al2O3) layer and Aluminum (Al) electrode layer for the TENGs. The 12-blade 100mm TENG produced an open circuit voltage of 180VOC and a short circuit current of 10μA at 1000RPM and 0.04Nm applied torque. The Al2O3 thin-film blocking layer exhibited a two-fold increase in current and a three-fold increase in voltage output for the tested TENG devices.","PeriodicalId":165158,"journal":{"name":"2021 IEEE 20th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS)","volume":"4 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-12-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"117078082","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Stretchable Piezoelectric Tensile Sensor Patterned via Ultraviolet Laser Cutting 紫外激光切割可拉伸压电张力传感器
2021 IEEE 20th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS) Pub Date : 2021-12-06 DOI: 10.1109/PowerMEMS54003.2021.9658378
Mayue Shi, A. Holmes, E. Yeatman
{"title":"Stretchable Piezoelectric Tensile Sensor Patterned via Ultraviolet Laser Cutting","authors":"Mayue Shi, A. Holmes, E. Yeatman","doi":"10.1109/PowerMEMS54003.2021.9658378","DOIUrl":"https://doi.org/10.1109/PowerMEMS54003.2021.9658378","url":null,"abstract":"This paper reports a piezoelectric dynamic tensile sensor comprising a metalized polyvinylidene fluoride (PVDF) film patterned with fractal curves and encapsulated in polydimethylsiloxane (PDMS). Because of the high precision and low peripheral heating of the UV laser process, we could achieve a PVDF linewidth down to 600 μm with single step cutting while maintaining piezoelectric functionality. With a second-order fractal curve, our PVDF sensor is omnidirectionally stretchable. In tensile tests using a linear slider, we found this sensor showed good dynamic sensitivity, detecting extension rates down to 5 mm/s. UV laser cutting provides a simple, fast and cheap fabrication process for stretchable piezoelectric devices including low-power sensors and wearable energy harvesters. The fabrication process and the device are highly compatible with rapidly developing stretchable self-powered systems.","PeriodicalId":165158,"journal":{"name":"2021 IEEE 20th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS)","volume":"161 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-12-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124505976","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
PowerMEMS 2021 Index PowerMEMS 2021指数
2021 IEEE 20th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS) Pub Date : 2021-12-06 DOI: 10.1109/powermems54003.2021.9658372
{"title":"PowerMEMS 2021 Index","authors":"","doi":"10.1109/powermems54003.2021.9658372","DOIUrl":"https://doi.org/10.1109/powermems54003.2021.9658372","url":null,"abstract":"","PeriodicalId":165158,"journal":{"name":"2021 IEEE 20th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS)","volume":"10 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-12-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131412181","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Systematic investigation of bipolar-charged electret/triboelectric power generator: modeling, experiments and applications 双极充电驻极体/摩擦发电机的系统研究:建模、实验与应用
2021 IEEE 20th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS) Pub Date : 2021-12-06 DOI: 10.1109/PowerMEMS54003.2021.9658384
Zhe Zhao, K. Tao
{"title":"Systematic investigation of bipolar-charged electret/triboelectric power generator: modeling, experiments and applications","authors":"Zhe Zhao, K. Tao","doi":"10.1109/PowerMEMS54003.2021.9658384","DOIUrl":"https://doi.org/10.1109/PowerMEMS54003.2021.9658384","url":null,"abstract":"Inspired by an electromagnetic hydropower station with a reverse polarized magnet, we proposed a new design methodology of electret rotatory power generator (e-RPG) with bipolar-charged electrets for boosting its output performance. A selectively localized corona discharging method is invented to have both positive and negative ultra-high-resolution charges implanted into a single electret thin film. A generalized theoretical model of unipolar-charged and bipolar-charged e-RPG is derived to evaluate their performance and the key features affecting their performance are the initial capacitances with different connection schemes. Experimental results show that: the output power of the bipolar-charged e-RPG is increased to 393.4% compared to those of the positive alone and negative alone configurations, which fully agree with those obtained from the theoretical model. Based on the modeling analysis and experimental verification, it is clarified the average output power of the bipolar e-RPG are increased up to 400% compared with those of the unipolar e-RPG, which provides a direction for the subsequent research on improving the output performance of the electret generator.","PeriodicalId":165158,"journal":{"name":"2021 IEEE 20th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS)","volume":"14 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-12-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123169109","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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