{"title":"Chemical Mechanical Polishing","authors":"이재경, 문원하, 황호정","doi":"10.1002/9781118696224.ch8","DOIUrl":"https://doi.org/10.1002/9781118696224.ch8","url":null,"abstract":"","PeriodicalId":144956,"journal":{"name":"Wafer Manufacturing","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2002-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130348779","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0