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International Journal of The Japan Society for Precision Engineering最新文献

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An end-point detector for planarization of semiconductor devices by chemical mechanical polishing 用化学机械抛光使半导体器件平面化的终点检测器
International Journal of The Japan Society for Precision Engineering Pub Date : 1995-01-01 DOI: 10.2493/JJSPE.61.854
S. Moriyama, K. Yamaguchi, Y. Honma, K. Yasui
{"title":"An end-point detector for planarization of semiconductor devices by chemical mechanical polishing","authors":"S. Moriyama, K. Yamaguchi, Y. Honma, K. Yasui","doi":"10.2493/JJSPE.61.854","DOIUrl":"https://doi.org/10.2493/JJSPE.61.854","url":null,"abstract":"A novel end-point detection technique is proposed for planarization of semiconductor wafers by chemical mechanical polishing. In this technique, a local thickness variation of polished layer is observed in-situ in detail, instead of observing a mean thickness value of the whole layer with conventional technique. The detection head owns two sensors, and mounted on a rotating platen for polishing. The first sensor is a fluid gap gage for measuring a surface position of the polished layer. The second one is an optical pick-up for measuring a bottom position of the layer. A residual thickness value of the polished layer, which is a target of this end-point detection, can be known as difference of the both values. A prototype detector was constructed. The experimental results show a 0.1μm sensitivity and a capability for manufacturing use.","PeriodicalId":14336,"journal":{"name":"International Journal of The Japan Society for Precision Engineering","volume":"34 1","pages":"55-58"},"PeriodicalIF":0.0,"publicationDate":"1995-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"75304727","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
Effect of Auditory Feedback on Operating Efficiency and Fatigue -In the Case of Manual Cut-Off Turning with Virtual Lathe- 听觉反馈对操作效率和疲劳的影响——以虚拟车床手动切断车削为例
International Journal of The Japan Society for Precision Engineering Pub Date : 1995-01-01 DOI: 10.2493/JJSPE.61.1317
H. Kato, Tadakazu Sato
{"title":"Effect of Auditory Feedback on Operating Efficiency and Fatigue -In the Case of Manual Cut-Off Turning with Virtual Lathe-","authors":"H. Kato, Tadakazu Sato","doi":"10.2493/JJSPE.61.1317","DOIUrl":"https://doi.org/10.2493/JJSPE.61.1317","url":null,"abstract":"From the economical efficiency, the manufacturing system in which the mentality and flexibility of human operators are utilized positively is occasionally superior to a fully-automated system. In order to take the manual operation into a manufacturing system reasonably, the operation should be rightly appreciated and the arrangement in the system should be fully investigated. In the well-arranged system, the operators can become swiftly accustomed to their job, their performance can be high and their fatigue can be low. The purpose of this research is to clarify the characteristics of the manual operation systematically. To do this, a virtual manually-operated-machine or simulator has been developed. By using the simulator, it is possible to monitor the behavior of the operator precisely. In the present paper, as the first step to the research, operating efficiency and fatigue of the operators have been analyzed experimentally, when they got operating force as auditory information besides force perception. The examined operation is a cut-off turning with a virtual lathe. As the results, the auditory feedback is significantly effective in improvement of efficiency and reduction of fatigue, though the effectiveness is different according to timbre of the feedback sound.","PeriodicalId":14336,"journal":{"name":"International Journal of The Japan Society for Precision Engineering","volume":"23 1","pages":"325-330"},"PeriodicalIF":0.0,"publicationDate":"1995-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"80382551","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
A thresholding method for circuit pattern images containing low contrast signals 包含低对比度信号的电路图形图像的阈值化方法
International Journal of The Japan Society for Precision Engineering Pub Date : 1995-01-01 DOI: 10.2493/JJSPE.61.1409
Y. Hara, H. Doi, K. Karasaki, Tadashi Iida, Norihiro Minatani, Minoru Nohara
{"title":"A thresholding method for circuit pattern images containing low contrast signals","authors":"Y. Hara, H. Doi, K. Karasaki, Tadashi Iida, Norihiro Minatani, Minoru Nohara","doi":"10.2493/JJSPE.61.1409","DOIUrl":"https://doi.org/10.2493/JJSPE.61.1409","url":null,"abstract":"This paper describes a method for thresholding gray-scale images to produce binary images in real time. It is specifically designed for thresholding images that contain both small, low-contrast defect patterns and relatively large, high-contrast circuit patterns without image deformation. This method analyzes peaks and troughs in the detected signal waveforms to threshold the low-contrast patterns ; it applies the constant threshold technique to the high-contrast circuit patterns. Experiments show that this method can properly threshold images containing both small defect patterns of approximately 20% contrast and circuit patterns of approximately 90% contrast.","PeriodicalId":14336,"journal":{"name":"International Journal of The Japan Society for Precision Engineering","volume":"8 1","pages":"148-154"},"PeriodicalIF":0.0,"publicationDate":"1995-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"91302448","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Development of New Ultrasonic Dressing Equipment 新型超声修整设备的研制
International Journal of The Japan Society for Precision Engineering Pub Date : 1995-01-01 DOI: 10.2493/JJSPE.61.986
Yasushi Ikuse, Takeshi Nonokawa, Noritugu Kawabata, Takehiko Kamo, Yoshihiko Yuzawa, Kuniaki Unno
{"title":"Development of New Ultrasonic Dressing Equipment","authors":"Yasushi Ikuse, Takeshi Nonokawa, Noritugu Kawabata, Takehiko Kamo, Yoshihiko Yuzawa, Kuniaki Unno","doi":"10.2493/JJSPE.61.986","DOIUrl":"https://doi.org/10.2493/JJSPE.61.986","url":null,"abstract":"5.1 超音波ドレッシング装置の有効性超音波振動子に電わい振動子を適用することにより軽量小型化を図った超音波ドレッシング装置を試作し, ビトリファイドCBNホイールに適用した場合, 次の有効性を見い出した.(1) 研削動力を減少させ, かつ表面粗さを向上できること, (2) 表面粗さを評価基準とした超音波ドレッシングによるホイールの目立て間寿命は, 超音波を付加しない場合に比べ同等以上である。しかし本報告では, 紙面の関係上, 詳細なドレッシングおよび研削特性については述べてぃなぃ. そのため, これらの点については, 次報にて評することにする.5.2 超音波ドレッシング装置によるモニタリング振動子の駆動電源のピーク電圧の変動を抽出することにより, ツルーイング時の偏心量とホイール作業面の断面形状をモニタリングできることがわかった. しかし, 工具形状やッルー イングおよびドレッシング条件によって, ピーク電圧の出力が変動する現象が認められるので, 今後この点については, 詳細に検討することにする.","PeriodicalId":14336,"journal":{"name":"International Journal of The Japan Society for Precision Engineering","volume":"177 1","pages":"217-222"},"PeriodicalIF":0.0,"publicationDate":"1995-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"74178668","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 14
Sectional Area for Calculation of Deformation in Screw Thread 螺纹变形计算的截面积
International Journal of The Japan Society for Precision Engineering Pub Date : 1995-01-01 DOI: 10.2493/JJSPE.61.1260
Shuji Hosokawa, Yoshio Umeyama, Susumu Kumakura
{"title":"Sectional Area for Calculation of Deformation in Screw Thread","authors":"Shuji Hosokawa, Yoshio Umeyama, Susumu Kumakura","doi":"10.2493/JJSPE.61.1260","DOIUrl":"https://doi.org/10.2493/JJSPE.61.1260","url":null,"abstract":"The elastic behavior of screw thread has been studied by tensile test on the screw thread of M6-M20×1.5, and by Finite Element Method. Elastically equivalent cylinder's cross sectional areas of threaded bar approximately coincide with experimental and calculated values. Both values are small compared to the usual value called stress area, which is used to estimate the tensile strength of the screw thread. Then a new equivalent cross sectional area is proposed expressing the relation between load and elongation in the screw thread, and an empirical equation is obtained that the equivalent area of the screw thread is considered to be a function of the ratio of pitch to major diameter on the external thread.","PeriodicalId":14336,"journal":{"name":"International Journal of The Japan Society for Precision Engineering","volume":"25 1","pages":"172-176"},"PeriodicalIF":0.0,"publicationDate":"1995-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"74985728","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
An Identification Method of Physical Parameters for Positioning Mechanism 一种定位机构物理参数辨识方法
International Journal of The Japan Society for Precision Engineering Pub Date : 1994-02-05 DOI: 10.2493/JJSPE.60.211
S. Wakui
{"title":"An Identification Method of Physical Parameters for Positioning Mechanism","authors":"S. Wakui","doi":"10.2493/JJSPE.60.211","DOIUrl":"https://doi.org/10.2493/JJSPE.60.211","url":null,"abstract":"The positioning mechanism can be regarded as a simple vibration system with one degree of freedom. Generally speaking, it is difficult to identify the physical parameters of this mechanism without decomposing. In this paper, an identification method of physical parameters for positioning mechanism is described. Firstly it is shown that the viscous damping of slide mechanism can be derived by measuring the frequency response from the collocated sensor to the non-collocated sensor. Moreover, the spring constant between the mechanism also can be derived more accurately in comparison with the value based on the impulse response. Secondary the equivalent viscous damping is calculated by means of the constant velocity test or the frequency response. Then the viscous damping of rotation mechanism may easily be derived by subtracting the converted viscous damping, which is the value of slide mechanism at the position of motor axis, from the equivalent viscous damping. Finally, the proposed identification method is applied to an actual positioning mechanism.","PeriodicalId":14336,"journal":{"name":"International Journal of The Japan Society for Precision Engineering","volume":"92 1","pages":"211-214"},"PeriodicalIF":0.0,"publicationDate":"1994-02-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"80347358","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Formation and anti-corrosion characteristics of electron beam alloyed layers 电子束合金层的形成及其防腐特性
International Journal of The Japan Society for Precision Engineering Pub Date : 1994-01-01 DOI: 10.2493/jjspe.60.1034
A. Iwata, M. Nakao
{"title":"Formation and anti-corrosion characteristics of electron beam alloyed layers","authors":"A. Iwata, M. Nakao","doi":"10.2493/jjspe.60.1034","DOIUrl":"https://doi.org/10.2493/jjspe.60.1034","url":null,"abstract":"Surface alloys which have composition similar to stainless steel are produced on mild steel substrates by traversing the substrates under electron beam irradiation. Chromium and nickel powders are fixed onto the substrates with water glass. An electro-magnetic deflection system oscillates the beam as if its cross section at the substrate surface looks like a rectangle. A mathematical model is constructed which describes diffusion of alloying elements from powders on the surface into an alloyed layer. It is assumed that the alloying elements diffuse instantaneously into an alloyed layer. The calculated results on the concentration distribution show good agree-ment with experimental results. Anti-corrosion characteristics of the alloyed layers are evaluated by anodic polarization curves measured along Japanese Industrial Standard G 0579. The anodic polarization curves of the alloys were similar to the standard curve of a stainless steel, SUS 304, but show somewhat higher peak current density for passivation. The concentration of water glass in powders should be in the range of 0.8 to 2% to attain good and stable anodic polarization curves. The anodic polarization characteristics are better when the density of chromium and nickel is higher.","PeriodicalId":14336,"journal":{"name":"International Journal of The Japan Society for Precision Engineering","volume":"1 1","pages":"134-139"},"PeriodicalIF":0.0,"publicationDate":"1994-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"88227249","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Design of a Three-Dimensional Cut-away Tool for the Turning of High Manganese Steels 高锰钢车削三维切削刀具的设计
International Journal of The Japan Society for Precision Engineering Pub Date : 1994-01-01 DOI: 10.2493/JJSPE.60.1284
T. Kitagawa, A. Kubo, K. Maekawa
{"title":"Design of a Three-Dimensional Cut-away Tool for the Turning of High Manganese Steels","authors":"T. Kitagawa, A. Kubo, K. Maekawa","doi":"10.2493/JJSPE.60.1284","DOIUrl":"https://doi.org/10.2493/JJSPE.60.1284","url":null,"abstract":"A cut-away or restricted contact tool for turning operations has been proposed and successfully employed to improve the machinability of an 18%Mn-18%Cr manganese steel (HB=241). Both chip contact length on the rake face and chip flow direction can be uniquely determined by the energy method after Usui and others, when the restricted length is assumed to be proportional to the real feed in the direction of chip flow. The optimum restricted length is found to be 1.25 times as large as the real feed, which is slightly wider than that of the two-dimensional cut-away tool. The predicted cutting force, cutting temperature and tool wear are all in good agreement with experiment. The restriction of the contact length reduces cutting force and heat generation on the shear plane and at the tool-chip interface, leading to a decrease in tool temperature. As a result, crater wear on the rake face of a P20 grade carbide tool is lessened by 10 % compared with the dry turning of such a high-hardness metal using a natural contact tool.","PeriodicalId":14336,"journal":{"name":"International Journal of The Japan Society for Precision Engineering","volume":"29 1","pages":"26-32"},"PeriodicalIF":0.0,"publicationDate":"1994-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"78821187","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Material characteristics and cutting performance of TiN-Al2O3 ceramic tool TiN-Al2O3陶瓷刀具的材料特性及切削性能
International Journal of The Japan Society for Precision Engineering Pub Date : 1994-01-01 DOI: 10.2493/JJSPE.60.1470
T. Egawa, T. Ichikizaki, H. Tsukamoto, H. Tsunoda, T. Shimoyama
{"title":"Material characteristics and cutting performance of TiN-Al2O3 ceramic tool","authors":"T. Egawa, T. Ichikizaki, H. Tsukamoto, H. Tsunoda, T. Shimoyama","doi":"10.2493/JJSPE.60.1470","DOIUrl":"https://doi.org/10.2493/JJSPE.60.1470","url":null,"abstract":"With the objective of producing a ceramic tool for hardened steel cutting that is 10% the price of cBN sintered tool but with equal cutting performance, a TiN-Al2O3 ceramic tool was developed in which Al2O3 particles are dispersed throughout a matrix that uses TiN as the principal component. When bearing steel (SUJ2, HRC60) is cut, a TiN-Al2O3 ceramic tool that is 40vol% Al2O3 particles produces 25% less flank wear than does a cBN sintered tool. Furthermore, by the time the flank wear land width VB reaches 0.2mm, the surface roughness of the cBN sintered tool worsens to 4.0 μmRmax; however, that of the TiN-Al2O3 ceramic tool is maintained at a value better than 2.5 μmRmax. Also, investigation of the residual stress in the machined work found no difference between the TiN-Al2O3 ceramic tool and cBN sintered tool, Even if a cBN sintered tool were to be substituted with a TiN-Al2O3 ceramic tool, no problem would generate in the residual stress of cutting surface.","PeriodicalId":14336,"journal":{"name":"International Journal of The Japan Society for Precision Engineering","volume":"16 1","pages":"222-228"},"PeriodicalIF":0.0,"publicationDate":"1994-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"86681480","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 5
Correction of specimen orientation in three-dimensional measurement of surface roughness with small waviness by contact stylus instrument (2nd report) : simulation and experimental verification 接触式触针仪小波浪形表面粗糙度三维测量中试样取向的校正(第2报告):仿真与实验验证
International Journal of The Japan Society for Precision Engineering Pub Date : 1994-01-01 DOI: 10.2493/JJSPE.60.549
N. Cho, T. Tsukada, M. Takahashi
{"title":"Correction of specimen orientation in three-dimensional measurement of surface roughness with small waviness by contact stylus instrument (2nd report) : simulation and experimental verification","authors":"N. Cho, T. Tsukada, M. Takahashi","doi":"10.2493/JJSPE.60.549","DOIUrl":"https://doi.org/10.2493/JJSPE.60.549","url":null,"abstract":"In this paper, the method I is compared with the method II. The method I is developed in the 1st report to control surface orientation by using two measuring lines perpendicular to each other and the method II by two parallel measuring lines. The results are as follows . (1)The measuring length for control data in the method I increases for anisotropic rough surface under the condition that the angle between measuring direction and lay orientation of asperities is less than 15•K . (2)The measuring length for control data in the method II decreases as the coefficient k2 depending on a stylus speed decreases. (3)Both of the measuring length and the objective function showing measuring time in the method II are shorter than those in the method I for isotropic and anisotropic rough surfaces . Finally, the method II is better technique than the method I .","PeriodicalId":14336,"journal":{"name":"International Journal of The Japan Society for Precision Engineering","volume":"4 1","pages":"253-258"},"PeriodicalIF":0.0,"publicationDate":"1994-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"90049486","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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