Nonastronomical Adaptive Optics最新文献

Cooled and Uncooled One-Channel Deformable Mirrors for Industrial Laser Machines 工业激光机器用冷却和非冷却单通道可变形镜

Nonastronomical Adaptive Optics Pub Date : 1900-01-01 DOI: 10.1364/nao.1997.mc.4

A. G. Safrońov

引用次数: 0

Adaptive receive telescope array for coherent free-space laser communications 相干自由空间激光通信的自适应接收望远镜阵列

Nonastronomical Adaptive Optics Pub Date : 1900-01-01 DOI: 10.1364/nao.1997.mb.3

A. Kalmar, K. Kudielka, W. Leeb

引用次数: 0

Applications of Shack-Hartman wavefront sensing and adaptive optics for in place laser gain media measurements and for horizontal path optical communications Shack-Hartman波前传感和自适应光学在原位激光增益介质测量和水平路径光通信中的应用

Nonastronomical Adaptive Optics Pub Date : 1900-01-01 DOI: 10.1364/nao.1997.tua.2

B. Levine, A. Wirth, F. Landers, E. Martinsen, A. Jankevics, M. Toledo-Quiñones, T. Bruno, R. Zielinski

{"title":"Applications of Shack-Hartman wavefront sensing and adaptive optics for in place laser gain media measurements and for horizontal path optical communications","authors":"B. Levine, A. Wirth, F. Landers, E. Martinsen, A. Jankevics, M. Toledo-Quiñones, T. Bruno, R. Zielinski","doi":"10.1364/nao.1997.tua.2","DOIUrl":"https://doi.org/10.1364/nao.1997.tua.2","url":null,"abstract":"The Shack-Hartmann wavefront sensor is a miniaturized version of the classical Hartmann mask extended by using a two-dimensional array of lenslets that is optically conjugate to the wavefront surface under test. The sensitivity and dynamic range of the wavefront measurement is controlled by the combination of reimaging optics and the diameter and focal length of the lenslet array. This allows an adjustment of the gradient measurement sensitivity . As the beam size is reduced in reimaging the test surface, the angular spread of the beam is magnified. This magnification increases the size of the gradients or tilts of the ray bundles from micro-radians to milliradians for typical testing configurations. Measurements of such large angles are not so prone to error due to mechanical and thermal instabilities in the sensor equipment as are interferometric sensors where dimensional stability must always be measured in parts of a micron. It is this flexibility that makes it possible for the same sensor system to measure with very high accuracy the wavefront produced by a Hubble Space Telescope simulator and, with a change of lens array, the shape of f/0.7 paraboloids.","PeriodicalId":135541,"journal":{"name":"Nonastronomical Adaptive Optics","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125861079","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 1

An Investigation of Active Optics for Extreme-Ultraviolet Projection Lithography 极紫外投影光刻的主动光学研究

Nonastronomical Adaptive Optics Pub Date : 1900-01-01 DOI: 10.1364/nao.1997.mc.3

H. Chapman, D. Sweeney

{"title":"An Investigation of Active Optics for Extreme-Ultraviolet Projection Lithography","authors":"H. Chapman, D. Sweeney","doi":"10.1364/nao.1997.mc.3","DOIUrl":"https://doi.org/10.1364/nao.1997.mc.3","url":null,"abstract":"Projection lithography systems are being developed to print 0.1 μm features over a large field, using extreme ultraviolet (EUV) light of a wavelength of around 13 nm. At this wavelength the optics must be all-reflective with multilayer coatings. Current designs of the projection optics consist of off-axis ringfield systems with three or four mirrors (see Fig. I). The demands of microlithography are that the image must be of high quality across the entire field and within a large depth of focus, and that image distortion must be less than 10 nm. These requirements put severe constraints on the quality of the mirrors, which, in general, must have figure errors better than 0.2 nm rms. Although such tolerances can be met by the present state of the art there are various sources of error which can degrade the optical performance of the system. Of those sources, many may cause only low-frequency, quasi-static errors. These error sources include deformation due to stress of the multilayer coatings, thermal and gravitational loading, optical manufacture, and maintenance and alignment of the system. We are investigating the possibility of actively controlling the figure of the mirrors to correct for such errors and achieve the desired imaging performance. Control of the surface figure may also allow a greater throughput of the system, by being able to accommodate a higher heat load from a more intense EUV source.","PeriodicalId":135541,"journal":{"name":"Nonastronomical Adaptive Optics","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125560135","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Laser requirements on active tracking 主动跟踪的激光要求

Nonastronomical Adaptive Optics Pub Date : 1900-01-01 DOI: 10.1364/nao.1997.mb.1

J. Riker, P. Merritt, J. Roark

引用次数: 4

Overview of the Shutura International Workshop for Adaptive Optics for Industry and Medicine Shutura工业和医学自适应光学国际研讨会综述

Nonastronomical Adaptive Optics Pub Date : 1900-01-01 DOI: 10.1364/nao.1997.ma.1

F. Merkle, C. Dainty, A. Kudryashov

引用次数: 0

The electrical and optical properties of liquid devices for adaptive optics 自适应光学液体器件的电学和光学特性

Nonastronomical Adaptive Optics Pub Date : 1900-01-01 DOI: 10.1364/nao.1997.tub.2

G. Love, D. Buscher, A. Purvis, D. Robertson, R. Sharpies

引用次数: 0

Use of an LCPM to Simulate Time Varying Atmospheric Distortion for an Adaptive Optics System: Laboratory Demonstration 用LCPM模拟自适应光学系统时变大气畸变:实验室演示

Nonastronomical Adaptive Optics Pub Date : 1900-01-01 DOI: 10.1364/nao.1997.tub.4

J. Gonglewski, S. Browne, R. Highland, D. Dayton, S. Sandven

引用次数: 0

Liquid Crystal Phase Modulators For Time Phase Distortion Simulations 用于时间相位失真模拟的液晶相位调制器

Nonastronomical Adaptive Optics Pub Date : 1900-01-01 DOI: 10.1364/nao.1997.tub.3

J. Gonglewski, A. Kudryashov, S. Browne, R. Highland

引用次数: 0

Adaptive Correction of Laser Beam Aberration On Atmospheric Paths 大气路径上激光束像差的自适应校正

Nonastronomical Adaptive Optics Pub Date : 1900-01-01 DOI: 10.1364/nao.1997.tua.3

V. Lukin, B. Fortes

引用次数: 0