Daniel Dominguez, L. Hackett, Michael R. Miller, Jennifer Restrepo, Katya Casper, M. Eichenfield
{"title":"Megahertz Bandwidth Bulk Micromachined Optomechanical Accelerometer.","authors":"Daniel Dominguez, L. Hackett, Michael R. Miller, Jennifer Restrepo, Katya Casper, M. Eichenfield","doi":"10.2172/1847615","DOIUrl":"https://doi.org/10.2172/1847615","url":null,"abstract":"","PeriodicalId":105170,"journal":{"name":"Proposed for presentation at the IEEE International Symposium on Inertial Sensors and Systems held February 22-25, 2021 in Virtual, Virtual.","volume":"118 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-02-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116439184","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}