Daniel Dominguez, L. Hackett, Michael R. Miller, Jennifer Restrepo, Katya Casper, M. Eichenfield
{"title":"Megahertz Bandwidth Bulk Micromachined Optomechanical Accelerometer.","authors":"Daniel Dominguez, L. Hackett, Michael R. Miller, Jennifer Restrepo, Katya Casper, M. Eichenfield","doi":"10.2172/1847615","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":105170,"journal":{"name":"Proposed for presentation at the IEEE International Symposium on Inertial Sensors and Systems held February 22-25, 2021 in Virtual, Virtual.","volume":"118 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2021-02-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proposed for presentation at the IEEE International Symposium on Inertial Sensors and Systems held February 22-25, 2021 in Virtual, Virtual.","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.2172/1847615","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}