Microsystem Technologies最新文献

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Foreword: Special Issue on ESDA 2022 前言:2022 年 ESDA 特刊
Microsystem Technologies Pub Date : 2024-07-11 DOI: 10.1007/s00542-024-05696-x
Bharat Bhushan
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引用次数: 0
Correction: Design and fabrication of a novel microswitch made in LTCC-PDMS technology applicable to micro total analysis systems 更正:采用 LTCC-PDMS 技术设计和制造适用于微型总体分析系统的新型微动开关
Microsystem Technologies Pub Date : 2024-07-05 DOI: 10.1007/s00542-024-05719-7
R. Rosa, Pierre Andre Barroca, A. Seabra
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引用次数: 0
Fabrication of the microfluidic channels in silicon wafers using isotropic wet etching method: the impact of the composition of HNA solution on etching 利用各向同性湿法蚀刻在硅片上制作微流控通道:HNA 溶液成分对蚀刻的影响
Microsystem Technologies Pub Date : 2024-05-16 DOI: 10.1007/s00542-024-05688-x
Priyanka Dewangan, Soumya Purohit, Vishal Sahu, Robbi Vivek Vardhan, Mahesh Peddigari, Prem Pal
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引用次数: 0
Correction: A conceptual study on novel current mirror integrated cantilever (CMIC) mass sensor for micro-gram (µg) range sensing applications 更正:针对微克(µg)范围传感应用的新型电流镜集成悬臂 (CMIC) 质量传感器的概念研究
Microsystem Technologies Pub Date : 2024-02-14 DOI: 10.1007/s00542-024-05619-w
Menuvolu Tetseo, Kalpana Gogoi, Shashiranjan Kumar, Gaurav Kumar, Peesapati Rangababu, Akhilrendra Pratap Singh, P. Rathore
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引用次数: 0
Correction: A conceptual study on novel current mirror integrated cantilever (CMIC) mass sensor for micro-gram (µg) range sensing applications 更正:针对微克(µg)范围传感应用的新型电流镜集成悬臂 (CMIC) 质量传感器的概念研究
Microsystem Technologies Pub Date : 2024-02-14 DOI: 10.1007/s00542-024-05619-w
Menuvolu Tetseo, Kalpana Gogoi, Shashiranjan Kumar, Gaurav Kumar, Peesapati Rangababu, Akhilrendra Pratap Singh, P. Rathore
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引用次数: 0
Foreword: special issue on CCSN-22 前言:CCSN-22 特刊
Microsystem Technologies Pub Date : 2024-01-23 DOI: 10.1007/s00542-023-05599-3
Bharat Bhushan
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引用次数: 0
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