Precision Engineering最新文献

筛选
英文 中文
Comparing repeatability and reproducibility of topographic measurement types directly using linear regression analyses of measured heights 直接利用测量高度的线性回归分析比较地形测量类型的重复性和再现性
Precision Engineering Pub Date : 2024-02-01 DOI: 10.1016/j.precisioneng.2024.02.009
Katarzyna Peta, George Love, Chris Brown
{"title":"Comparing repeatability and reproducibility of topographic measurement types directly using linear regression analyses of measured heights","authors":"Katarzyna Peta, George Love, Chris Brown","doi":"10.1016/j.precisioneng.2024.02.009","DOIUrl":"https://doi.org/10.1016/j.precisioneng.2024.02.009","url":null,"abstract":"","PeriodicalId":501382,"journal":{"name":"Precision Engineering","volume":"51 11","pages":""},"PeriodicalIF":0.0,"publicationDate":"2024-02-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"139890490","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Dynamic solid-liquid mixing mechanical model of contact surfaces and experiment of M50 aviation bearing steel by using ultrasonic-assisted electrolytic in-process dressing grinding M50 航空轴承钢接触面动态固液混合力学模型及超声波辅助电解工序内修整磨削实验
Precision Engineering Pub Date : 2024-02-01 DOI: 10.1016/j.precisioneng.2024.02.008
Jianxing Wu, Huaichao Wu, Lv Yang, Fang Lu, Bin Ji, Limei Zhao
{"title":"Dynamic solid-liquid mixing mechanical model of contact surfaces and experiment of M50 aviation bearing steel by using ultrasonic-assisted electrolytic in-process dressing grinding","authors":"Jianxing Wu, Huaichao Wu, Lv Yang, Fang Lu, Bin Ji, Limei Zhao","doi":"10.1016/j.precisioneng.2024.02.008","DOIUrl":"https://doi.org/10.1016/j.precisioneng.2024.02.008","url":null,"abstract":"","PeriodicalId":501382,"journal":{"name":"Precision Engineering","volume":"48 ","pages":""},"PeriodicalIF":0.0,"publicationDate":"2024-02-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"139826295","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Advanced pneumatic microgripper for versatile biomedical micromanipulation 用于多功能生物医学微操作的先进气动微型夹具
Precision Engineering Pub Date : 2024-02-01 DOI: 10.1016/j.precisioneng.2024.02.005
Yue Zhao, Haofei Wu, Lulu Zheng, Yangjun Wang, Yichen Zhu, Liguo Chen
{"title":"Advanced pneumatic microgripper for versatile biomedical micromanipulation","authors":"Yue Zhao, Haofei Wu, Lulu Zheng, Yangjun Wang, Yichen Zhu, Liguo Chen","doi":"10.1016/j.precisioneng.2024.02.005","DOIUrl":"https://doi.org/10.1016/j.precisioneng.2024.02.005","url":null,"abstract":"","PeriodicalId":501382,"journal":{"name":"Precision Engineering","volume":"43 11","pages":""},"PeriodicalIF":0.0,"publicationDate":"2024-02-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"139880897","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Theoretical predictions and experimental measurements of novel aerostatic bearing with multi-inclined-orifice restrictors for the improvement of stability 带多倾斜孔节流器的新型空气静压轴承的理论预测和实验测量,以提高稳定性
Precision Engineering Pub Date : 2024-02-01 DOI: 10.1016/j.precisioneng.2024.02.007
Puliang Yu, Liang Huang, Shize Li, Liangbin Guo, Min Zhong, Liping Zhang
{"title":"Theoretical predictions and experimental measurements of novel aerostatic bearing with multi-inclined-orifice restrictors for the improvement of stability","authors":"Puliang Yu, Liang Huang, Shize Li, Liangbin Guo, Min Zhong, Liping Zhang","doi":"10.1016/j.precisioneng.2024.02.007","DOIUrl":"https://doi.org/10.1016/j.precisioneng.2024.02.007","url":null,"abstract":"","PeriodicalId":501382,"journal":{"name":"Precision Engineering","volume":"50 1","pages":""},"PeriodicalIF":0.0,"publicationDate":"2024-02-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"139817875","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Measurement of number-weighted particle size distribution for CMP slurry using nanoparticle chip 利用纳米颗粒芯片测量 CMP 泥浆的数重粒度分布
Precision Engineering Pub Date : 2023-12-21 DOI: 10.1016/j.precisioneng.2023.12.012
Jiaqing Zhu, Terutake Hayashi, Syuhei Kurokawa
{"title":"Measurement of number-weighted particle size distribution for CMP slurry using nanoparticle chip","authors":"Jiaqing Zhu, Terutake Hayashi, Syuhei Kurokawa","doi":"10.1016/j.precisioneng.2023.12.012","DOIUrl":"https://doi.org/10.1016/j.precisioneng.2023.12.012","url":null,"abstract":"<p>Chemical mechanical polishing/planarization (CMP) slurry contains mainly abrasive grains (primary particles) with few aggregations (secondary particles). Measuring the particle size distribution (PSD) of CMP slurry is crucial for improving the productivity of the CMP process. For the quality management of CMP slurry, it is necessary to evaluate both the sizes and quantities of both the primary and secondary particles. Conventional PSD analysis methods, except for image analysis, face challenges in identifying primary and secondary particles for PSD measurements. For image analysis, the particles must be transferred from a suspension to a substrate using the conventional sampling method; however, this creates aggregates, resulting in a change in the PSD of the particles on the substrate compared to that in suspension under poly-dispersed conditions. Thus, this study proposed a novel particle sizing method using nanoparticle chip (NPC) to assist in the image analysis of the PSD. The NPC can pick up a single particle in a small volume droplet to avoid aggregation and maintain the poly-dispersed condition of the particles in suspension. The primary and secondary particles can be identified using scanning electron microscope (SEM) or atomic force microscope (AFM), and the PSD can be evaluated by measuring the area and height of the particles. Further, the quantities of both the primary and secondary particles can be counted from the substrate. This study presented a comparison of the diameter measurements using NPC and the conventional method. The results show that the NPC identified the primary and secondary particles and decreased the measurement error of the particle diameters. Consequently, the NPC proves to be superior to the conventional method for use in the PSD analysis of CMP slurry.</p>","PeriodicalId":501382,"journal":{"name":"Precision Engineering","volume":"16 1","pages":""},"PeriodicalIF":0.0,"publicationDate":"2023-12-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"139030235","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Blade profile extraction and edge completion method based on structured light measurement point cloud 基于结构光测量点云的叶片轮廓提取和边缘补全方法
Precision Engineering Pub Date : 2023-12-01 DOI: 10.1016/j.precisioneng.2023.12.005
Zijun Li, Zhao Wang, Junhui Huang, Qiongqiong Duan, M. Qi, Jianmin Gao, Wei Wang, Qiang Dong, Qiyuan Li, Song Ai
{"title":"Blade profile extraction and edge completion method based on structured light measurement point cloud","authors":"Zijun Li, Zhao Wang, Junhui Huang, Qiongqiong Duan, M. Qi, Jianmin Gao, Wei Wang, Qiang Dong, Qiyuan Li, Song Ai","doi":"10.1016/j.precisioneng.2023.12.005","DOIUrl":"https://doi.org/10.1016/j.precisioneng.2023.12.005","url":null,"abstract":"","PeriodicalId":501382,"journal":{"name":"Precision Engineering","volume":"70 14","pages":""},"PeriodicalIF":0.0,"publicationDate":"2023-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"139014386","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
0
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
确定
请完成安全验证×
相关产品
×
本文献相关产品
联系我们:info@booksci.cn Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。 Copyright © 2023 布克学术 All rights reserved.
京ICP备2023020795号-1
ghs 京公网安备 11010802042870号
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术官方微信