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Ultra-sensitive and compact on-chip gas sensor on a silicon nitride photonic integrated circuit (Conference Presentation) 基于氮化硅光子集成电路的超灵敏紧凑型片上气体传感器(会议报告)
Silicon Photonics XV Pub Date : 2020-03-09 DOI: 10.1117/12.2557047
G. Antonacci, J. Goyvaerts, Haolan Zhao, B. Baumgartner, B. Lendl, R. Baets
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