IPRM 2011 - 23rd International Conference on Indium Phosphide and Related Materials最新文献

筛选
英文 中文
A Generic InP-based Photonic Integration Technology 基于inp的通用光子集成技术
H. Ambrosius, X. Leijtens, T. de Vries, J. Bolk, E. Smalbrugge, M. Smit
{"title":"A Generic InP-based Photonic Integration Technology","authors":"H. Ambrosius, X. Leijtens, T. de Vries, J. Bolk, E. Smalbrugge, M. Smit","doi":"10.1109/OECC.2012.6276483","DOIUrl":"https://doi.org/10.1109/OECC.2012.6276483","url":null,"abstract":"This paper describes a Generic InP-based Photonic Integration Technology that enables fabrication of a large variety of active- as well as passive circuits. In the COBRA clean room in Eindhoven a robust modular process flow is developed which consists of more than 10 depositions (including epitaxial growth), about 10 lithography steps (depending on the design) and more than 20 dry and wet etching steps. This process can be used to fabricate different circuits on one wafer in so-called multi-project wafer runs which allows a drastic reduction of the fabrication costs making even small- volume production economically feasible.","PeriodicalId":371480,"journal":{"name":"IPRM 2011 - 23rd International Conference on Indium Phosphide and Related Materials","volume":"7 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2011-05-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123834069","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 5
High-speed directly-modulated lasers with photon-photon resonance 具有光子-光子共振的高速直接调制激光器
IPRM 2011 - 23rd International Conference on Indium Phosphide and Related Materials Pub Date : 2011-05-22 DOI: 10.1364/NFOEC.2013.JW2A.33
M. Dumitrescu, A. Laakso, J. Viheriala, M. Kamp, P. Melanen, P. Uusimaa
{"title":"High-speed directly-modulated lasers with photon-photon resonance","authors":"M. Dumitrescu, A. Laakso, J. Viheriala, M. Kamp, P. Melanen, P. Uusimaa","doi":"10.1364/NFOEC.2013.JW2A.33","DOIUrl":"https://doi.org/10.1364/NFOEC.2013.JW2A.33","url":null,"abstract":"The epitaxial overgrowth, employed in the fabrication of conventional buried gratings, is avoided by using lateral corrugations of the ridge-waveguide as surface gratings, thus decreasing the fabrication complexity, increasing the yield and reducing the fabrication cost of distributed feedback and distributed Bragg reflector edge-emitting lasers. Single-and multiple-contact edge-emitting lasers with laterally-corrugated ridge waveguide gratings have been developed both on GaAs and InP substrates with the aim to exploit the photon-photon resonance in order to extend their direct modulation bandwidth. The characteristics of such surface-grating-based lasers emitting both at 1.3 and 1.55 µm are presented, including photon-photon-resonance-extended small-signal modulation bandwidth in excess of 20 GHz achieved with a 1.6 mm long single-contact device under direct modulation. Similarly structured devices, with shorter lengths are expected to exceed 40 GHz small-signal modulation bandwidth under direct modulation.","PeriodicalId":371480,"journal":{"name":"IPRM 2011 - 23rd International Conference on Indium Phosphide and Related Materials","volume":"8 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2011-05-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115851516","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
0
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
确定
请完成安全验证×
相关产品
×
本文献相关产品
联系我们:info@booksci.cn Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。 Copyright © 2023 布克学术 All rights reserved.
京ICP备2023020795号-1
ghs 京公网安备 11010802042870号
Book学术文献互助
Book学术文献互助群
群 号:604180095
Book学术官方微信