{"title":"Examples in Synthesis, Analysis, Design, and Fabrication of MEMS","authors":"S. Lyshevski","doi":"10.1201/9781315219288-10","DOIUrl":"https://doi.org/10.1201/9781315219288-10","url":null,"abstract":"","PeriodicalId":353302,"journal":{"name":"Nano- and Micro-Electromechanical Systems","volume":"36 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-10-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127181606","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Devising and Synthesis of NEMS and MEMS","authors":"S. Lyshevski","doi":"10.1201/9781315219288-5","DOIUrl":"https://doi.org/10.1201/9781315219288-5","url":null,"abstract":"","PeriodicalId":353302,"journal":{"name":"Nano- and Micro-Electromechanical Systems","volume":"34 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-10-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116057292","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Modeling of Micro- and Nanoscale Electromechanical Systems and Devices","authors":"S. Lyshevski","doi":"10.1201/9781315219288-6","DOIUrl":"https://doi.org/10.1201/9781315219288-6","url":null,"abstract":"","PeriodicalId":353302,"journal":{"name":"Nano- and Micro-Electromechanical Systems","volume":"65 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-10-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131254420","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Molecular and Carbon Nanoelectronics","authors":"S. Lyshevski","doi":"10.1201/9781315219288-8","DOIUrl":"https://doi.org/10.1201/9781315219288-8","url":null,"abstract":"","PeriodicalId":353302,"journal":{"name":"Nano- and Micro-Electromechanical Systems","volume":"11 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-10-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115553038","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Nano- and Microsystems: Classification and Consideration","authors":"S. Lyshevski","doi":"10.1201/9781315219288-3","DOIUrl":"https://doi.org/10.1201/9781315219288-3","url":null,"abstract":"","PeriodicalId":353302,"journal":{"name":"Nano- and Micro-Electromechanical Systems","volume":"19 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-10-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116815980","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Nano- and Microscale Systems, Devices, and Structures","authors":"S. Lyshevski","doi":"10.1201/9781315219288-2","DOIUrl":"https://doi.org/10.1201/9781315219288-2","url":null,"abstract":"","PeriodicalId":353302,"journal":{"name":"Nano- and Micro-Electromechanical Systems","volume":"83 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-10-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134355615","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Quantum Mechanics and Its Applications","authors":"S. Lyshevski","doi":"10.1201/9781315219288-7","DOIUrl":"https://doi.org/10.1201/9781315219288-7","url":null,"abstract":"","PeriodicalId":353302,"journal":{"name":"Nano- and Micro-Electromechanical Systems","volume":"23 8","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-10-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114047625","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Nano- and Microscience, Engineering, and Technology","authors":"S. Lyshevski","doi":"10.1201/9781315219288-1","DOIUrl":"https://doi.org/10.1201/9781315219288-1","url":null,"abstract":"","PeriodicalId":353302,"journal":{"name":"Nano- and Micro-Electromechanical Systems","volume":"45 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-10-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123644979","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Control of MEMS and NEMS","authors":"S. Lyshevski","doi":"10.1201/9781315219288-9","DOIUrl":"https://doi.org/10.1201/9781315219288-9","url":null,"abstract":"","PeriodicalId":353302,"journal":{"name":"Nano- and Micro-Electromechanical Systems","volume":"31 8","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-10-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133391143","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Fundamentals of Microfabrication and MEMS Fabrication Technologies","authors":"S. Lyshevski","doi":"10.1201/9781315219288-4","DOIUrl":"https://doi.org/10.1201/9781315219288-4","url":null,"abstract":"","PeriodicalId":353302,"journal":{"name":"Nano- and Micro-Electromechanical Systems","volume":"46 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-10-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130445819","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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