{"title":"An in-situ single photon source detection platform for deterministic nanometer resolution ion implantation.","authors":"Michael Titze, K. Hooghan, H. Htoon, E. Bielejec","doi":"10.2172/1856095","DOIUrl":"https://doi.org/10.2172/1856095","url":null,"abstract":"","PeriodicalId":301282,"journal":{"name":"Proposed for presentation at the APS March Meeting held March 14-19, 2021 in Online.","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2020-03-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131917700","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}