H. Katsui, T. Goto
{"title":"Chemical Vapor Deposition","authors":"H. Katsui, T. Goto","doi":"10.1002/9783527691036.hsscvol2025","DOIUrl":"https://doi.org/10.1002/9783527691036.hsscvol2025","url":null,"abstract":"","PeriodicalId":283900,"journal":{"name":"Multi-dimensional Additive Manufacturing","volume":"42 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2020-11-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123328838","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1