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Novel Patterning Technologies 2023最新文献

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Hierarchical patterning: sub-10 µm 3D structures nano-textured by block copolymer self-assembly 层次化:通过嵌段共聚物自组装形成的10微米以下的纳米三维结构
Novel Patterning Technologies 2023 Pub Date : 2023-04-30 DOI: 10.1117/12.2654150
Raphaël Feougier, M. Argoud, N. Possémé, R. Tiron
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