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Capacitive Silicon Resonators最新文献

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Capacitive Silicon Resonators with Movable Electrode Structures 具有可移动电极结构的电容性硅谐振器
Capacitive Silicon Resonators Pub Date : 2019-07-10 DOI: 10.1201/9780429266010-10
N. Toan, T. Ono
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引用次数: 0
Capacitive Silicon Resonators with Narrow Gaps Formed by Metal-Assisted Chemical Etching 金属辅助化学蚀刻形成窄间隙电容硅谐振器
Capacitive Silicon Resonators Pub Date : 2019-07-10 DOI: 10.1201/9780429266010-7
N. Toan, T. Ono
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引用次数: 0
Capacitive Silicon Nanomechanical Resonators with Selective Vibration of High-Order Mode 具有高阶模选择性振动的电容性硅纳米机械谐振器
Capacitive Silicon Resonators Pub Date : 2019-07-10 DOI: 10.1201/9780429266010-9
N. Toan, T. Ono
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引用次数: 0
A Long-Bar-Type Capacitive Silicon Resonator with a High Quality Factor 具有高品质因数的长棒型电容硅谐振器
Capacitive Silicon Resonators Pub Date : 2019-07-10 DOI: 10.1201/9780429266010-5
N. Toan, T. Ono
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引用次数: 0
Fabrication Techniques for Capacitive Silicon Resonators 电容性硅谐振器的制造技术
Capacitive Silicon Resonators Pub Date : 2019-07-10 DOI: 10.1201/9780429266010-3
N. Toan, T. Ono
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引用次数: 0
Capacitive Silicon Resonators Using Neutral Beam Etching Technology 采用中性束蚀刻技术的电容性硅谐振器
Capacitive Silicon Resonators Pub Date : 2019-07-10 DOI: 10.1201/9780429266010-6
N. Toan, T. Ono
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引用次数: 0
Capacitive Silicon Resonator Structures 电容硅谐振器结构
Capacitive Silicon Resonators Pub Date : 2019-07-10 DOI: 10.1201/9780429266010-2
N. Toan, T. Ono
{"title":"Capacitive Silicon Resonator Structures","authors":"N. Toan, T. Ono","doi":"10.1201/9780429266010-2","DOIUrl":"https://doi.org/10.1201/9780429266010-2","url":null,"abstract":"","PeriodicalId":260265,"journal":{"name":"Capacitive Silicon Resonators","volume":"39 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-07-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115960551","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Conclusions 结论
Capacitive Silicon Resonators Pub Date : 2019-07-10 DOI: 10.1201/9780429266010-12
Nguyễn Văn Toản, Takahito Ono
{"title":"Conclusions","authors":"Nguyễn Văn Toản, Takahito Ono","doi":"10.1201/9780429266010-12","DOIUrl":"https://doi.org/10.1201/9780429266010-12","url":null,"abstract":"","PeriodicalId":260265,"journal":{"name":"Capacitive Silicon Resonators","volume":"234 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-07-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114260482","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Hermetically Packaged Capacitive Silicon Resonators on LTCC Substrate LTCC衬底密封封装电容性硅谐振器
Capacitive Silicon Resonators Pub Date : 2019-07-10 DOI: 10.1201/9780429266010-4
N. Toan, T. Ono
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引用次数: 0
Mechanically Coupled Capacitive Nanomechanical Silicon Resonators 机械耦合电容式纳米机械硅谐振器
Capacitive Silicon Resonators Pub Date : 2019-07-10 DOI: 10.1201/9780429266010-8
N. Toan, T. Ono
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引用次数: 0
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