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Synthesis of ultrananocrystalline diamond films by microwave plasma-assisted chemical vapor deposition 微波等离子体辅助化学气相沉积法制备超晶金刚石薄膜

New Diamond and Frontier Carbon Technology Pub Date : 2006-06-04 DOI: 10.1109/PLASMA.2006.1707163

D. Tran, Wenpu Huang, J. Asmussen, T. Grotjohn, D. Reinhard

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引用次数: 7