MOEMS and Miniaturized Systems XVIII最新文献

MOEMS and Miniaturized Systems XVIII Pub Date : 2019-05-24 DOI: 10.1117/12.2531962

引用次数: 0

Ultrathin Arrayed Camera with 3D Capillary Filling Method for Fingerprint Imaging (Conference Presentation) 基于3D毛细管填充法的超薄阵列相机指纹成像(会议报告)

MOEMS and Miniaturized Systems XVIII Pub Date : 2019-03-13 DOI: 10.1117/12.2507916

Sang‐In Bae, Kyung-Won Jang, Kisoo Kim, K. Jeong

{"title":"Ultrathin Arrayed Camera with 3D Capillary Filling Method for Fingerprint Imaging (Conference Presentation)","authors":"Sang‐In Bae, Kyung-Won Jang, Kisoo Kim, K. Jeong","doi":"10.1117/12.2507916","DOIUrl":"https://doi.org/10.1117/12.2507916","url":null,"abstract":"Eyes of insects in the nature have been evolved in assorted structures according to the place of residence, hours of living, or the way of perception. The structure of the insect eye not only has different composition that dissolve the incoming light according to its direction of origin, i.e., an apposition and a superposition eyes, but also has a wide field-of-view (FOV), a high spatial resolution, and a sensitivity. Conventional artificial compound eye cameras have limited features that only focus on one of the characteristics of the insect eye, such as lens diameter and lens barrel length. We report an optically adjustable ultrathin arrayed camera, which adjusts the FOV, lens diameter and focal length independently. The ultrathin arrayed camera consists of UV-curable resin based microlens array on CMOS image sensor and each lens is surrounded by a liquid-filled blocking layer to reduce optical cross-talks between neighboring lenses. Fabrication of the arrayed lens includes photolithography process of Au/Cr metal pattern on frontside and Cr pattern on backside of borosilicate glass. Each of the lenses are replicated from microhole arrays fabricated by isotropic wet etching of the borosilicate glass with HF (49%) etchant. The arrayed camera has adjustable lens diameter and curvature by etching time control and SU-8 post thickness control during photolithography. Fingerprint image was successfully obtained by an image processing from individual optical channels. This ultrathin arrayed camera will suggest a new approach to the development of light-filled camera and compact ultrathin camera in the medical, industrial, or military fields.","PeriodicalId":129091,"journal":{"name":"MOEMS and Miniaturized Systems XVIII","volume":"37 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-03-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131930746","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Switchable pattern projector module with rotational offset of double microlens arrays for 3D endoscopy (Conference Presentation) 用于3D内窥镜的双微透镜阵列旋转偏移的可切换模式投影仪模块(会议报告)

MOEMS and Miniaturized Systems XVIII Pub Date : 2019-03-04 DOI: 10.1117/12.2508546

Sung-Pyo Yang, Jae-Beom Kim, Kyungmin Hwang, K. Jeong

{"title":"Switchable pattern projector module with rotational offset of double microlens arrays for 3D endoscopy (Conference Presentation)","authors":"Sung-Pyo Yang, Jae-Beom Kim, Kyungmin Hwang, K. Jeong","doi":"10.1117/12.2508546","DOIUrl":"https://doi.org/10.1117/12.2508546","url":null,"abstract":"Three-dimensional (3D) endoscopes provide depth information and help determining the surgical sites more accurately. Among the conventional 3D endoscopic techniques, efforts on implementation of structured illumination method into 3D imaging system was actively made due to the potential of light environmental robustness and miniaturization. However, structured illumination methods are suffering from the low resolution, which is affected by the light patterns density and uniformity with minimized projector.\u0000In this work, we demonstrate switchable pattern projector module using rotational offsets of double microlens arrays (MLAs) for 3D endoscopic imaging with structured illumination method. The pattern projector module includes diffractive optical element part of double MLAs with rotational offsets for double diffraction pattern generation and the switchable light source part of fiber bundle comprised of the GRIN fiber for collimating laser at the center and other surrounding fibers for white-light illumination. The double MLAs was fabricated using double-sided photolithography on 4-inch borosilicate wafer, thermal reflow with hydrophobic nano film, and parylene-c coating. The period, curvature and rotational offset angle of double MLAs were determined to have high density and uniformity of the projected dot array patterns. The calculated disparity map of non-textured 3D object showed increase on resolution and robustness on surrounding light environment compared to the disparity map with stereoscopic imaging method. The 3D imaging system using the projector module can provide depth information with miniaturized system and lead to various applications for medical imaging as well as other imaging applications in industrial and military fields.","PeriodicalId":129091,"journal":{"name":"MOEMS and Miniaturized Systems XVIII","volume":"38 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-03-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116614919","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Inverted complementary plasmonic structures of aluminum nanoholes and nanodisks for transmissive structural coloration in visible range (Conference Presentation) 铝纳米孔和纳米盘在可见光范围内透射结构着色的反向互补等离子体结构(会议报告)

MOEMS and Miniaturized Systems XVIII Pub Date : 2019-03-04 DOI: 10.1117/12.2509052

Myeong‐Su Ahn, Taerin Chung, C. Hwang, Sang‐In Bae, K. Jeong

引用次数: 0

Deeply etched silicon optical cavity with curved slotted micromirrors (Conference Presentation) 具有弯曲狭缝微镜的深蚀刻硅光学腔(会议报告)

MOEMS and Miniaturized Systems XVIII Pub Date : 2019-03-04 DOI: 10.1117/12.2508208

Ahmad Mahfouz, H. Omran, Y. Sabry, D. Khalil, F. Marty, T. Bourouina

引用次数: 1