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Front Matter: Volume 10746 封面:10746卷
Novel Optical Systems Design and Optimization XXI Pub Date : 2018-11-05 DOI: 10.1117/12.2516168
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引用次数: 0
Parallel spectroscopic ellipsometry system for fast correction of surface variability in metrology-based systems (Conference Presentation) 用于快速校正计量系统表面变异性的平行光谱椭偏系统(会议报告)
Novel Optical Systems Design and Optimization XXI Pub Date : 2018-09-17 DOI: 10.1117/12.2320183
Andrey Nazarov, Michael Ney, I. Abdulhalim
{"title":"Parallel spectroscopic ellipsometry system for fast correction of surface variability in metrology-based systems (Conference Presentation)","authors":"Andrey Nazarov, Michael Ney, I. Abdulhalim","doi":"10.1117/12.2320183","DOIUrl":"https://doi.org/10.1117/12.2320183","url":null,"abstract":"In interferometry based metrology systems, the sample’s topography is extracted from the interference phase which is determined by a combination of both the topography of the sample and its reflectancetransmission phase governed by the sample‘s structure and material composition. Since the two contributions cannot be distinguished, variations of the samples surface (surface variability) can be falsely interpreted as topography changes and undermine the reliability of interferometric measurement. For this reason, knowledge of the sample’s structurecomposition is required to eliminate its effect on the interference phase, which is rarely available a priori. \u0000Spectroscopic ellipsometry is a well-known metrology technique for the determination of the optical and thus structural properties of multilayered samples with high accuracy through a measurement of some ellipsometric parameters. These parameters are extracted for each pixel in the sample by a combination of sequential measurements taken with a variation in the orientation of a polarizer or a compensator, or most commonly a rotating analyzercompensator. Thus the acquisition time and throughput are limited in addition to the constraint of stationary sample during data acquisition (rotation) for noise and errors reduction. These techniques are not suitable for high throughput oriented production lines and dynamic samples where the sample is in constant motion. \u0000We present a novel fast spectroscopic ellipsometry system enabling the parallel acquisition of all necessary data enabling high speed and accurate sample characterization. This parallel spectroscopic ellipsometer is integrated with our dynamic focusing probe, allowing high-speed and surface variability immune interferometry based axial position tracking.","PeriodicalId":115857,"journal":{"name":"Novel Optical Systems Design and Optimization XXI","volume":"23 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-09-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123897429","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
MEMS SpectroChip in visible and near-infrared range for home healthcare, food safety, and blockchain applications MEMS光谱芯片在可见光和近红外范围内用于家庭医疗保健，食品安全和区块链应用
Novel Optical Systems Design and Optimization XXI Pub Date : 2018-09-17 DOI: 10.1117/12.2322054
C. Ko
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引用次数: 0
Visible and near-IR range linear variable filter with two-dimensional modeling 可见光和近红外范围线性可变滤波器与二维建模
Novel Optical Systems Design and Optimization XXI Pub Date : 2018-09-17 DOI: 10.1117/12.2322049
C. Ko, J. Tsai, Bang-ji Wang, Shin-Fa Lin, Chitsung Hong, Wei-Huai Chiu
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引用次数: 0
The hyperspectral imaging achieved by aberration-corrected freeform concave blaze grating with variable line spacing 采用变线距自由凹斑光栅进行像差校正，实现了高光谱成像
Novel Optical Systems Design and Optimization XXI Pub Date : 2018-09-17 DOI: 10.1117/12.2322052
C. Ko, J. Tsai, Bang-ji Wang, Shin-Fa Lin, Chitsung Hong, Wei-Huai Chiu
{"title":"The hyperspectral imaging achieved by aberration-corrected freeform concave blaze grating with variable line spacing","authors":"C. Ko, J. Tsai, Bang-ji Wang, Shin-Fa Lin, Chitsung Hong, Wei-Huai Chiu","doi":"10.1117/12.2322052","DOIUrl":"https://doi.org/10.1117/12.2322052","url":null,"abstract":"To design a concave grating for a hyperspectral imaging (HSI) system, it is critical to achieve flat field focusing in both the horizontal and vertical directions on the image sensor. We have developed a generalized automation aberration reduction procedure (ARP) that can be applied in any cases of a concave grating spectrometer. \u0000The concave grating, which has a free-form profile with blaze grating pitch and variable line spacing [3], is fabricated using five-axis CNC machine with nanometer machining precision for hyperspectral imaging. In order to evaluate the performance, an optical system is designed and setup to measure the focused spot size, spectral resolution and diffraction efficiency.","PeriodicalId":115857,"journal":{"name":"Novel Optical Systems Design and Optimization XXI","volume":"18 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-09-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131448869","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
IR GRIN optics (Conference Presentation) 红外GRIN光学(会议报告)
Novel Optical Systems Design and Optimization XXI Pub Date : 2018-09-17 DOI: 10.1117/12.2321229
S. Bayya, D. Gibson, V. Nguyen, J. Sanghera, M. Kotov, Collin C. McClain, J. Vizgaitis
{"title":"IR GRIN optics (Conference Presentation)","authors":"S. Bayya, D. Gibson, V. Nguyen, J. Sanghera, M. Kotov, Collin C. McClain, J. Vizgaitis","doi":"10.1117/12.2321229","DOIUrl":"https://doi.org/10.1117/12.2321229","url":null,"abstract":"Graded index (GRIN) optics offer potential for both weight savings and increased performance but have until recently been limited to visible and NIR bands (wavelengths shorter than about 0.9 µm). NRL has developed glass-based IR-GRIN lenses compatible with SWIR-LWIR wavebands. Recent designs show the potential for significant SWaP reduction benefits and improved performance using IR-GRIN lens elements in dual-band, MWIR-LWIR sensors. The SWaP and performance advantages of IR-GRIN lenses in platform-relevant dual-band imagers will be presented.","PeriodicalId":115857,"journal":{"name":"Novel Optical Systems Design and Optimization XXI","volume":"16 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-09-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126164764","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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