Microelectronic and MEMS Technologies - 最新文献
Pub Date : 2001-04-30
DOI: 10.1117/12.425298
A. M. Jorgensen, K. Mogensen, Weimin Rong, P. Telleman, J. P. Kutter
Pub Date : 2001-04-30
DOI: 10.1117/12.425332
H. Chiu, Shey-Shi Lu, Hai Lan
Pub Date : 2001-04-30
DOI: 10.1117/12.425306
E. Quevy, L. Buchaillot, D. Collard
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