{"title":"New actuation structure for the deformation of continuous mirrors for adaptive optics","authors":"E. Quevy, L. Buchaillot, D. Collard","doi":"10.1117/12.425306","DOIUrl":null,"url":null,"abstract":"This work demonstrates a novel technique for the realization and the actuation of continuous-membrane for adaptive optic applications. This original device exhibits, for the first time, both positive and negative membrane deflection with individual pixel displacement of +/- 10 micrometers , which is one order of magnitude larger than usual approaches, without diffractive interference.","PeriodicalId":429610,"journal":{"name":"Microelectronic and MEMS Technologies","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2001-04-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Microelectronic and MEMS Technologies","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.425306","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
This work demonstrates a novel technique for the realization and the actuation of continuous-membrane for adaptive optic applications. This original device exhibits, for the first time, both positive and negative membrane deflection with individual pixel displacement of +/- 10 micrometers , which is one order of magnitude larger than usual approaches, without diffractive interference.