2019 6th International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D)

Novel Sputter Film Deposition to Fabricate Thick Films with Extremely Smooth Surface Suitable for Room Temperature Bonding

Pub Date : 2019-11-27 DOI: 10.23919/LTB-3D.2019.8735262 T. Saito, H. Makita, T. Moriwaki, Y. Suzuki, N. Kato, S. Wakayanagi, A. Miura, M. Uomoto, T. Shimatsu

Impact of Ar atom irradiation on the crystallinity of GaAs/Si interfaces fabricated by surface activated bonding at room temperature

Pub Date : 2019-05-21 DOI: 10.23919/LTB-3D.2019.8735300 Y. Ohno, Reina Miyagawa, H. Yoshida, S. Takeda, Jianbo Liang, N. Shigekawa

Flexible Sensors – Materials, Interfaces and Surfaces

Pub Date : 2019-05-21 DOI: 10.23919/LTB-3D.2019.8735302 M. Deen, Arif Ul Alam