Advanced Semiconductor Manufacturing Conference and Workshop, 2003 IEEEI/SEMI

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Advanced Semiconductor Manufacturing Conference and Workshop, 2003 IEEEI/SEMI - 最新文献

An overview of thermal management for next generation microelectronic devices

Pub Date : 2003-04-22 DOI: 10.1109/ASMC.2003.1194502 S. S. Tonapi, R. Fillion, F.J. Schattenmann, H.S. Cole, J. D. Evans, B. Sammakia

Electrical properties of MOCVD HfO/sub 2/ dielectric layers with polysilicon gate electrodes for CMOS applications

Pub Date : 2003-04-22 DOI: 10.1109/ASMC.2003.1194482 L. Date, Z. Rittersma, D. Massoubre, Y. Ponomarev, F. Roozeboom, D. Pique, L. van-Autryve, S. Van Elshocht, M. Caymax

Wafer backside inspection applications in lithography

Pub Date : 2003-04-22 DOI: 10.1109/ASMC.2003.1194459 K. Lederer, M. Scholze, U. Strohbach, A. Wocko, T. Reuter, A. Schoenauer

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