一种在生产初期减少系统缺陷的统计方法

半导体技术 Pub Date : 2002-08-07 DOI:10.1109/ASMC.2002.1001578

K. Nemoto, S. Ikeda, O. Yoshida, J. Sasabe, Hua Su

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引用次数: 4

摘要

描述了一种在生产初期减少系统缺陷从而提高产量的方法。采用统计相关分析方法找出导致良率损失的关键工艺参数。该方法在300mm晶圆制造中的实际应用表明，该方法能够检测到需要修改的参数，从而提高良率。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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A statistical method for reducing systematic defects in the initial stages of production

A method is described for reducing systematic defects in the initial stages of production and thereby improving yield. Statistical correlation analysis is used to find the critical process parameters that cause yield loss. Application of the proposed method to actual 300-mm wafer fabrication demonstrated that it does detect the parameters to be modified resulting in yield improvement.

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来源期刊

半导体技术

自引率

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发文量

8436