二极管激光腔衰荡光谱分析痕量气体

半导体技术 Pub Date : 2002-04-18 DOI:10.1117/12.462654

Wen-Bin Yan, C. Krusen, J. Dudek, K. Lehmann, P. Rabinowitz

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引用次数: 5

摘要

开发了第一台基于腔衰荡光谱(CRDS)的商用分析仪，用于快速可靠地分析超痕量气体杂质。完整的分析系统MTO-1000能够测量从200ppm到5ppm的水分。微量水分测试数据将展示的响应速度，灵敏度和准确性的分析仪。

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Trace gas analysis by diode laser cavity ring-down spectroscopy

The first commercial analyzer based on cavity ringdown spectroscopy (CRDS) was developed to perform fast and reliable analysis of ultra trace gas impurities. The complete analytical system, the MTO-1000, is capable of measuring moisture from 200 parts-per-trillion (PPT) to 5 ppm. Trace moisture test data will be presented to demonstrate the speed of response, sensitivity, and accuracy of the analyzer.

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半导体技术

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