MEMS谐振器的非线性消除以改善功率处理

IEEE InternationalElectron Devices Meeting, 2005. IEDM Technical Digest. Pub Date : 2005-12-05 DOI:10.1109/IEDM.2005.1609330

M. Agarwal, K. Park, R. Candler, M. Hopcroft, C. Jha, R. Melamud, B. Kim, B. Murmann, T. Kenny

{"title":"MEMS谐振器的非线性消除以改善功率处理","authors":"M. Agarwal, K. Park, R. Candler, M. Hopcroft, C. Jha, R. Melamud, B. Kim, B. Murmann, T. Kenny","doi":"10.1109/IEDM.2005.1609330","DOIUrl":null,"url":null,"abstract":"In this work, we present mathematical analysis and experimental verification of the bifurcation limited power handling in MEMS resonators. We report useful cancellation between electrical and mechanical non-linearities. Within the scaling limits it has been found that the power handling improves for devices with larger electrode to resonator gaps. We also report an alternative method of measuring critical bifurcation using shifts in resonant frequency","PeriodicalId":13071,"journal":{"name":"IEEE InternationalElectron Devices Meeting, 2005. IEDM Technical Digest.","volume":"65 3 1","pages":"286-289"},"PeriodicalIF":0.0000,"publicationDate":"2005-12-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"33","resultStr":"{\"title\":\"Non-linearity cancellation in MEMS resonators for improved power-handling\",\"authors\":\"M. Agarwal, K. Park, R. Candler, M. Hopcroft, C. Jha, R. Melamud, B. Kim, B. Murmann, T. Kenny\",\"doi\":\"10.1109/IEDM.2005.1609330\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In this work, we present mathematical analysis and experimental verification of the bifurcation limited power handling in MEMS resonators. We report useful cancellation between electrical and mechanical non-linearities. Within the scaling limits it has been found that the power handling improves for devices with larger electrode to resonator gaps. We also report an alternative method of measuring critical bifurcation using shifts in resonant frequency\",\"PeriodicalId\":13071,\"journal\":{\"name\":\"IEEE InternationalElectron Devices Meeting, 2005. IEDM Technical Digest.\",\"volume\":\"65 3 1\",\"pages\":\"286-289\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2005-12-05\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"33\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"IEEE InternationalElectron Devices Meeting, 2005. IEDM Technical Digest.\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/IEDM.2005.1609330\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"IEEE InternationalElectron Devices Meeting, 2005. IEDM Technical Digest.","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IEDM.2005.1609330","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 33

摘要

在这项工作中，我们对MEMS谐振器中的分岔限制功率处理进行了数学分析和实验验证。我们报告了电非线性和机械非线性之间有用的消去。在标度限制内，对于电极与谐振腔间隙较大的器件，功率处理得到改善。我们还报告了一种利用谐振频率的位移测量临界分岔的替代方法

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Non-linearity cancellation in MEMS resonators for improved power-handling

In this work, we present mathematical analysis and experimental verification of the bifurcation limited power handling in MEMS resonators. We report useful cancellation between electrical and mechanical non-linearities. Within the scaling limits it has been found that the power handling improves for devices with larger electrode to resonator gaps. We also report an alternative method of measuring critical bifurcation using shifts in resonant frequency

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IEEE InternationalElectron Devices Meeting, 2005. IEDM Technical Digest.

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