热超声铜丝键合过程中月牙键拉力和断尾力的同步优化

J. Lee, M. Mayer, Y. Zhou, S. Hong, J. Moon
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引用次数: 17

摘要

在传统的金属丝键合工艺优化中,对月牙形键合进行破坏性拉环测试,并测量断键所需的拉力(PF)。虽然这种方法保证了最终的质量,但它不一定能最大限度地减少生产停工,这可能会显著降低吞吐量。许多停机是由短尾和尾升错误引起的,而短尾和尾升错误又由尾粘接强度降低引起。尾部断裂力(TBF)是衡量尾部粘结强度的一种指标。为了保证铜丝键合的稳定生产,需要始终如一的断尾操作,而无需人工辅助即可重新启动已停止的机器。我们报告了同时(同步)优化PF和TBF使用标准拉力测试和一种方法,直接测量尾部粘结强度在过程中分别。示例过程在标准镀银引线框架双衬垫和垂直于超声波喇叭方向的线环上使用标准25毫米直径的铜线。优化包括:(1)寻找获得对称键合形状的因素;(2)选择固定的键合时间(25 ms)和加热阶段温度(220℃);(3)通过迭代优化冲击力(IF)、结合力(BF)和超声波(US)参数,增加TBF最大化的优化步骤。在这些参数中,美国和BF是最显著的。进程窗口(PW)被定义为一组US/BF参数组合,这些组合导致响应在先前定义的范围内。确定了PF和TBF的pw,并进行了比较。这些pw只有部分重叠。为了提高TBF的工艺能力指数(cpk),建议首先进行常规的PF优化,然后将结合力参数最小化到仍然满足PF cpk要求的最小值。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Concurrent Optimization of Crescent Bond Pull Force and Tail Breaking Force in a Thermosonic Cu Wire Bonding Process
In conventional wire bonding process optimization, the crescent bond is tested by destructive pulling the loop and measure the pull force (PF) required to break the bond. While this method assures the final quality, it does not necessarily minimize production stoppages which can reduce throughput significantly. Many stoppages are caused by short-tail and tail-lift errors which in turn are caused by reduced tail bond strength. The tail breaking force (TBF) is a measure for tail bond strength. A consistent tail breaking operation is needed for robust Cu wire bond production with little operator assistance required to restart stopped machines. We report the concurrent (simultaneous) optimization of PF and TBF using standard pull testing and a method that directly measures the tail bond strength in-process, respectively. The example process uses standard 25-mum-diameter Cu wire on standard Ag-plated leadframe diepads and wire loops oriented perpendicular to the ultrasonic horn. The optimization consists of (1) finding the factors to obtain a symmetrical bond shape, (2) choosing fixed values for bond time (25 ms) and heater stage temperature (220degC), and (3) adding the new optimization step of maximizing the TBF by iteratively optimizing the impact force (IF), bonding force (BF), and ultrasound (US) parameters. Among these parameters, the US and BF are the most significant. A process window (PW) is defined as the set of US/BF parameter combinations that result in a response being inside a previously defined range. PWs for PF and TBF are determined and compared with each other. There is only a partial overlap of these PWs. To increase the process capability index (cpk) for TBF, it is recommended to first carry out conventional PF optimization followed by a minimization of the bonding force parameter to the lowest value still fulfilling the PF cpk requirement.
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