具有管型多晶硅沟道结构的三维堆叠NAND闪存器件中陷阱的表征

M. Jeong, S. Joe, B. Jo, Ho-Jung Kang, J. Bae, Kyoung-Rok Han, Eun-seok Choi, G. Cho, Sung-Kye Park, Byung-Gook Park, Jong-Ho Lee
{"title":"具有管型多晶硅沟道结构的三维堆叠NAND闪存器件中陷阱的表征","authors":"M. Jeong, S. Joe, B. Jo, Ho-Jung Kang, J. Bae, Kyoung-Rok Han, Eun-seok Choi, G. Cho, Sung-Kye Park, Byung-Gook Park, Jong-Ho Lee","doi":"10.1109/IEDM.2012.6479010","DOIUrl":null,"url":null,"abstract":"Trap density (D<sub>it</sub>) was extracted for the first time in 3-D stacked NAND flash memory with the tube-type poly-Si channel structure. We verified extracted D<sub>it</sub> with conductance method and charge pumping method in 32 nm floating gate (FG) NAND flash memory device. In 3-D stacked NAND flash memory device, the D<sub>it</sub> extracted by conductance method was 1~2×10<sup>12</sup> cm<sup>-2</sup>eV<sup>-1</sup> in E<sub>c</sub>-E<sub>T</sub> of 0.15~0.35 eV. The simulation results of I<sub>BL</sub>-V<sub>CG</sub> and C-V<sub>CG</sub> based on the D<sub>it</sub> were conformable with the measurement data. Then we investigated the effects of program/erase (P/E) cycling stress on 1/f noise in NAND flash devices. Finally, we extracted firstly the position of a trap generating random telegraph noise (RTN) by considering cylindrical coordinate and pass cell resistance in the 3-D stacked NAND flash memory cell.","PeriodicalId":6376,"journal":{"name":"2012 International Electron Devices Meeting","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2012-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"15","resultStr":"{\"title\":\"Characterization of traps in 3-D stacked NAND flash memory devices with tube-type poly-Si channel structure\",\"authors\":\"M. Jeong, S. Joe, B. Jo, Ho-Jung Kang, J. Bae, Kyoung-Rok Han, Eun-seok Choi, G. Cho, Sung-Kye Park, Byung-Gook Park, Jong-Ho Lee\",\"doi\":\"10.1109/IEDM.2012.6479010\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Trap density (D<sub>it</sub>) was extracted for the first time in 3-D stacked NAND flash memory with the tube-type poly-Si channel structure. We verified extracted D<sub>it</sub> with conductance method and charge pumping method in 32 nm floating gate (FG) NAND flash memory device. In 3-D stacked NAND flash memory device, the D<sub>it</sub> extracted by conductance method was 1~2×10<sup>12</sup> cm<sup>-2</sup>eV<sup>-1</sup> in E<sub>c</sub>-E<sub>T</sub> of 0.15~0.35 eV. The simulation results of I<sub>BL</sub>-V<sub>CG</sub> and C-V<sub>CG</sub> based on the D<sub>it</sub> were conformable with the measurement data. Then we investigated the effects of program/erase (P/E) cycling stress on 1/f noise in NAND flash devices. Finally, we extracted firstly the position of a trap generating random telegraph noise (RTN) by considering cylindrical coordinate and pass cell resistance in the 3-D stacked NAND flash memory cell.\",\"PeriodicalId\":6376,\"journal\":{\"name\":\"2012 International Electron Devices Meeting\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2012-12-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"15\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2012 International Electron Devices Meeting\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/IEDM.2012.6479010\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2012 International Electron Devices Meeting","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IEDM.2012.6479010","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 15

摘要

首次在具有管型多晶硅通道结构的3-D堆叠NAND闪存中提取了陷阱密度(Dit)。利用电导法和电荷泵送法在32nm浮栅(FG) NAND闪存器件中验证了提取Dit的可行性。在3-D堆叠NAND闪存器件中,电导法提取的Dit在0.15~0.35 eV的Ec-ET中为1~2×1012 cm-2eV-1。基于Dit的IBL-VCG和C-VCG仿真结果与实测数据吻合较好。然后研究了程序/擦除(P/E)循环应力对NAND闪存器件中1/f噪声的影响。最后,我们首先在三维堆叠NAND闪存单元中考虑圆柱坐标和通道单元电阻,提取产生随机电报噪声(RTN)的陷阱的位置。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Characterization of traps in 3-D stacked NAND flash memory devices with tube-type poly-Si channel structure
Trap density (Dit) was extracted for the first time in 3-D stacked NAND flash memory with the tube-type poly-Si channel structure. We verified extracted Dit with conductance method and charge pumping method in 32 nm floating gate (FG) NAND flash memory device. In 3-D stacked NAND flash memory device, the Dit extracted by conductance method was 1~2×1012 cm-2eV-1 in Ec-ET of 0.15~0.35 eV. The simulation results of IBL-VCG and C-VCG based on the Dit were conformable with the measurement data. Then we investigated the effects of program/erase (P/E) cycling stress on 1/f noise in NAND flash devices. Finally, we extracted firstly the position of a trap generating random telegraph noise (RTN) by considering cylindrical coordinate and pass cell resistance in the 3-D stacked NAND flash memory cell.
求助全文
通过发布文献求助,成功后即可免费获取论文全文。 去求助
来源期刊
自引率
0.00%
发文量
0
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
确定
请完成安全验证×
copy
已复制链接
快去分享给好友吧!
我知道了
右上角分享
点击右上角分享
0
联系我们:info@booksci.cn Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。 Copyright © 2023 布克学术 All rights reserved.
京ICP备2023020795号-1
ghs 京公网安备 11010802042870号
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术官方微信