超薄pt包覆4N铜线的纳米力学性能和纳米摩擦学研究

H. Hsu, J. Chien, S. Fu
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引用次数: 1

摘要

本文研究了超细铜线(ψ =0.6mil)的纳米力学性能和自由空气球(FAB)与铝键垫界面的纳米摩擦学。为了比较,我们选择商用pt包覆99.99% (4N)铜线和纯4N铜线作为测试材料。所有的案例研究都考虑了键合温度的影响。通过自行设计的拉丝夹具进行拉伸力学性能测试。采用无压痕仪测量FAB薄表面弹性模量。利用原子力显微镜(AFM)对粉碎后的FAB和键合垫的纳米摩擦学和界面摩擦行为进行了测量。利用AFM力-位移曲线来确定纳米摩擦学性能。界面摩擦力系数可以通过一系列的计算得到。测量了一个定义明确的接触区域,以研究摩擦力和摩擦应力。接触面的粗糙度影响摩擦力与表面力之间的接触。粗糙度参数的研究对应于摩擦强度和界面强度的评估。微/纳米摩擦学的局部变化也被测量。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
A study on Nano-mechanical properties and nano-tribology for ultra-thin Pt-coated 4N copper wire
Electronic Submission Nano-mechanical properties of ultra-thin copper wire (ψ =0.6mil) and nano-tribology along the interfacial between free air ball (FAB) and aluminum bond pad were carefully investigated in this paper. For comparison, commercial product Pt-coated 99.99% (4N) Cu wire and pure 4N Cu wire are selected as test materials. Bonding temperature effects were taken into account for all case studies. Tensile mechanical properties were conducted through self-designed wire pull test fixture. Nono-indentation instrument was applied to obtained thin surface elastic modulus on FAB. Nanotribology and interfacial frictional behavior along smashed FAB and bond pad were measured by Atomic Force Microscopy (AFM). AFM force-displacement curve is utilized to determine the nanotribology properties. The interfacial coefficient of frictional force can be derived from a serial of calculations. A well-defined contact area is measured to study the frictional force and friction stress. The roughness of contact surface influences the contact between friction and surface forces. The study of roughness parameters corresponds to evaluate the friction and the interfacial strengths. Local variation in micro/nano tribology is also measured.
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