基于杀伤比的产量冲击计算的准确性

半导体技术 Pub Date : 2002-08-07 DOI:10.1109/ASMC.2002.1001580

M. Ono, H. Iwata, K. Watanabe

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引用次数: 2

摘要

我们基于杀伤比分析评估了产量影响计算的准确性。利用计算机模拟缺陷图和bin图计算精度。结果表明，当检测报告中包含参数故障导致的低良率或大量非致命缺陷时，良率影响是不准确的。因此，在计算产量影响之前，建议评估bin图并减少非致命缺陷。

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Accuracy of yield impact calculation based on kill ratio

We evaluated the accuracy of yield impact calculations based on kill ratio analysis. The accuracy was calculated using computer simulated defect maps and bin maps. The results show that the yield impact was inaccurate when parametric faults caused low yield or a large number of non-killer defects were included in inspection reports. It is therefore recommended to evaluate bin maps and reduce the non-killer defects before calculating the yield impact.

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半导体技术

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8436