采用无流底填的倒装芯片近无空隙组装开发

Sangil Lee, M. Yim, R. Master, C. Wong, D. Baldwin
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引用次数: 10

摘要

先进的封装倒装芯片(FCIP)工艺技术,在高I/O密度(超过3000 I/O)和细间距(低至150 μ m)互连应用中使用无流底填材料,这给倒装芯片加工带来了挑战,因为回流过程中形成的底填空隙会降低互连成产量并降低可靠性。尽管存在这些挑战,但使用具有高I/O、细间距FCIP的商用无流底填材料,实现了高成品率、可靠的组装工艺(>99.99%)。这是通过物理解释技术的实验设计得到的。统计分析确定了在不破坏FCIP互连结构的情况下,应该使用什么装配条件来实现稳健的互连。然而,由此产生的高良率过程的副作用是在FCIP组件中造成大量空隙。进行了参数研究,以制定装配工艺条件,以尽量减少由热效应引起的FCIP中空洞的数量。这项工作大大减少了下填空隙的数量。本文通过结构化实验对产率表征、空洞形成表征和空洞减少进行了系统的研究,这些实验分别旨在提高FCIP组件的产率和减少空洞的数量。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Near Void-Free Assembly Development of Flip Chip Using No-Flow Underfill
The advanced flip-chip-in-package (FCIP) process technology, using no-flow underfill material for high I/O density (over 3000 I/O) and fine-pitch (down to 150 mum) interconnect applications, presents challenges for flip chip processing because underfill void formation during reflow drives interconnect yield down and degrades reliability. In spite of such challenges, a high yield, reliable assembly process (>99.99%) has been achieved using commercial no-flow underfill material with a high I/O, fine-pitch FCIP. This has been obtained using design of experiments with physical interpretation techniques. Statistical analysis determined what assembly conditions should be used in order to achieve robust interconnects without disrupting the FCIP interconnect structure. However, the resulting high yield process had the side effect of causing a large number of voids in the FCIP assemblies. Parametric studies were conducted to develop assembly process conditions that would minimize the number of voids in the FCIP induced by thermal effects. This work has resulted in a significant reduction in the number of underfill voids. This paper presents systematic studies into yield characterization, void formation characterization, and void reduction through the use of structured experimentation which was designed to improve assembly yield and to minimize the number of voids, respectively, in FCIP assemblies.
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