改进性能的三明治结构柔性热剪切应力传感器

2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2020-01-01 DOI:10.1109/MEMS46641.2020.9056242

Baoyun Sun, Wei Gao, Pengbin Wang, Run-Bo Chen, Jian Luo, Jinjun Deng, W. Yuan, B. Ma

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引用次数: 0

摘要

为了提高静态灵敏度和动态响应性能，提出了一种具有夹层结构的微柔性热剪切应力传感器。这种夹层结构由热敏电阻下方的保护加热器组成，并由聚苯二烯C薄膜电隔离。保护加热器的工作温度与热敏电阻相同，以消除从热敏电阻到衬底的不必要的热传导。与热敏电阻单独工作相比，剪切应力校准测试和阶跃电流表征结果表明，热敏电阻和保护加热器同时工作时，灵敏度提高47%，时间常数降低50%。

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Sandwich Structured Flexible Thermal Shear Stress Sensor with Improved Performance

We present a micro flexible thermal shear stress sensor with sandwich structure for enhanced static sensitivity and dynamic response performance. This sandwich structure consists of a guard-heater just underneath the thermistor and electrically isolated by a Parylene C film. The working temperature of the guard-heater is identical with the thermistor to eliminate unwanted heat conduction from the thermistor to the substrate. Compared with thermistor working individually, the results of shear stress calibration test and step current characterization demonstrate a 47% increase in sensitivity and 50% reduction in time constant when the thermistor and guard-heater working simultaneously.

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来源期刊

2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)

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