一种新型纳米铜颗粒浆料低温无压烧结的高可靠性高功率器件的模具键合方法

Hai-Jun Huang, X. Wu, Min-bo Zhou, Xin-Ping Zhang
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引用次数: 2

摘要

利用一种易于合成的纳米铜颗粒,制备了一种具有低温无压烧结性能的纳米铜颗粒浆料。Cu NP膏体具有双峰尺寸分布的特点,有利于烧结接头中形成以Cu块体为主的致密烧结微观结构。采用田口法对烧结工艺条件进行了优化,得到的铜膏体接头抗剪强度高达65.24 MPa。此外,用于制备铜NP膏体的含有乙二醇(EG)和甘油(甘油)的最佳重量比的溶剂的配方,也被证明是在接头中形成铜块并由此产生优异的键合强度的关键。最后,在200℃时效600 h后对Cu膏体接头进行高温贮藏(HTS)试验,结果表明,接头的结合强度略有下降,主要是由于Cu膏体/Cu界面处产生了空洞。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
A highly reliable die bonding approach for high power devices by low temperature pressureless sintering using a novel Cu nanoparticle paste
A novel Cu nanoparticle (NP) paste with the capability of pressureless sintering at low temperature in nitrogen is developed using a type of easily synthesized Cu NPs. The feature of bimodal size distribution of Cu NPs can be inherited to the Cu NP paste, which facilitates the formation of dense as-sintered microstructure, mainly consisted of Cu bulks, in sintered joints. The optimization of the sintering process condition has been achieved by using Taguchi method, and so-obtained Cu paste joints show shear strength as high as 65.24 MPa. Moreover, the formulation of the solvent containing ethylene glycol (EG) and glycerol with an optimized weight ratio, which is employed for preparation of the Cu NP paste, has also been demonstrated to be crucial for the formation of Cu bulks in joints and so-induced superior bonding strength. Finally, the results of high temperature storage (HTS) tests of Cu paste joints after aging at 200 °C for 600 h show that there is a slight degradation of bonding strength of joints, mainly due to the generation of voids at the Cu-paste/Cu interface.
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