高性能短沟道硅纳米线mosfet的室温载流子输运

A. Majumdar, S. Bangsaruntip, G. Cohen, L. Gignac, M. Guillorn, M. Frank, J. Sleight, D. Antoniadis
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引用次数: 23

摘要

对栅极长度和直径分别为25 nm和8 nm的硅纳米线mosfet的室温载流子输运进行了分析。结果表明,在Si NWs中,空穴表现出通道注入和热速度,与单轴应变平面Si通道电子的最高速度一样高,可能是由于应变和约束的结合。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Room-temperature carrier transport in high-performance short-channel Silicon nanowire MOSFETs
Room-temperature carrier transport in Si nanowire (NW) MOSFETs with gate lengths and diameters down to 25 and 8 nm, respectively, is analyzed. It is shown that in Si NWs, holes exhibit channel injection and thermal velocities, as high as the highest obtained for uniaxially strained planar Si-channel electrons, likely due to combination of strain and confinement.
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