柔性基板上薄硅晶片的倒装组装

C. Banda, R.W. Johnson, Tan Zhang, Z. Hou, H. Charles
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引用次数: 59

摘要

在汽车、工业、军事、航空航天、计算机、电信、消费电子和医疗电子行业的应用范围不断扩大的推动下,微型化和柔性电路的使用仍然是电子制造商的主要兴趣。将薄硅芯片(25-100微米)组装到柔性基板上,为从智能卡到天基雷达等应用提供了超薄、柔性电子产品的选择。对于高密度应用,3d模块可以通过堆叠和层压预组装和测试的柔性层,然后处理垂直互连来制造。本文描述了一种低成本、高可制造性的工艺,用于聚酰亚胺柔性基板的薄芯片倒装组装,消除了对特殊处理工具和技术的需要。在本文中,使用一种在模具放置和回流过程中保持柔性基板平坦的方法,将焊料碰撞变薄的模具回流焊到图案柔性上。回流,然后是下填料分配和固化。下填料的分配过程是关键的,以避免下填料流动到薄硅模具的顶部,将讨论。对采用这些工艺组装的零件进行了可靠性试验,得到了较高的可靠性,并给出了试验结果。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Flip Chip Assembly of Thinned Silicon Die on Flex Substrates
Driven by a growing range of applications in the automotive, industrial, military, aerospace, computer, telecommunication, consumer electronics, and medical electronics industries, miniaturization and the use of flex circuits continue to be of prime interest to electronics manufacturers. The assembly of thinned silicon die (25-100 mum) onto flex substrates provides options for ultrathin, flexible electronics for applications ranging from smart cards to space-based radars. For high-density applications, 3-D modules can be fabricated by stacking and laminating preassembled and tested flex layers and then processing vertical interconnections. This paper describes a low cost, highly manufacturable process developed for flip chip assembly of thinned die to poly-imide flex substrates that eliminates the need for special handling tools and techniques. In this paper, solder bumped thinned die are reflow soldered to the patterned flex using a method that maintains the flex substrate flat during die placement and reflow. Reflow is followed by underfill dispense and cure. The underfill dispense process is critical to avoid underfill flowing onto the top of the thin silicon die and will be discussed. Parts assembled using these processes have undergone reliability testing, a high degree of reliability has been found, and those results are presented.
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