利用(η - 3-烯丙基)Ru(CO)3X (X = Cl, Br, I)光活化Ru化学气相沉积:从分子吸附到Ru薄膜沉积

{"title":"利用(η - 3-烯丙基)Ru(CO)3X (X = Cl, Br, I)光活化Ru化学气相沉积:从分子吸附到Ru薄膜沉积","authors":"Bryan G. Salazar, Christopher R. Brewer, L. McElwee‐White, A. Walker","doi":"10.1116/6.0001490","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":17490,"journal":{"name":"Journal of Vacuum Science & Technology A","volume":"18 1","pages":""},"PeriodicalIF":2.4000,"publicationDate":"2022-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Photoactivated Ru chemical vapor deposition using (η3-allyl)Ru(CO)3X (X = Cl, Br, I): From molecular adsorption to Ru thin film deposition\",\"authors\":\"Bryan G. Salazar, Christopher R. Brewer, L. McElwee‐White, A. Walker\",\"doi\":\"10.1116/6.0001490\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":17490,\"journal\":{\"name\":\"Journal of Vacuum Science & Technology A\",\"volume\":\"18 1\",\"pages\":\"\"},\"PeriodicalIF\":2.4000,\"publicationDate\":\"2022-03-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Journal of Vacuum Science & Technology A\",\"FirstCategoryId\":\"88\",\"ListUrlMain\":\"https://doi.org/10.1116/6.0001490\",\"RegionNum\":3,\"RegionCategory\":\"材料科学\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q3\",\"JCRName\":\"MATERIALS SCIENCE, COATINGS & FILMS\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Vacuum Science & Technology A","FirstCategoryId":"88","ListUrlMain":"https://doi.org/10.1116/6.0001490","RegionNum":3,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"MATERIALS SCIENCE, COATINGS & FILMS","Score":null,"Total":0}