悬浮栅MOSFET:将新的MEMS功能带入固态MOS晶体管

N. Abelé, R. Fritschi, K. Boucart, F. Casset, P. Ancey, A. Ionescu
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引用次数: 176

摘要

参考文献nanolab - conf -2005-019查看Web of Science record中创建时间为2007-05-16,修改时间为2017-05-10的记录
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Suspended-gate MOSFET: bringing new MEMS functionality into solid-state MOS transistor
Reference NANOLAB-CONF-2005-019View record in Web of Science Record created on 2007-05-16, modified on 2017-05-10
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