{"title":"用于逻辑应用的适度掺杂通道多finet","authors":"Y. Shiho, D. Burnett, M. Orlowski, J. Mogab","doi":"10.1109/IEDM.2005.1609525","DOIUrl":null,"url":null,"abstract":"In this paper, moderately doped channel (MDC) multiple-FinFET is proposed and its electrical characteristics are investigated using 3D process and device, and 2D mixed-mode device and circuit simulation. It is shown that the MDC offers a better immunity to variations of the fin profile than the undoped channel for a short channel device, and Multiple-FinFET is critical for logic applications. The implementation of an asymmetrical doping profile further improves the performance of MDC Multiple-FinFET","PeriodicalId":13071,"journal":{"name":"IEEE InternationalElectron Devices Meeting, 2005. IEDM Technical Digest.","volume":"60 1","pages":"976-979"},"PeriodicalIF":0.0000,"publicationDate":"2005-12-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"7","resultStr":"{\"title\":\"Moderately doped channel multiple-finFET for logic applications\",\"authors\":\"Y. Shiho, D. Burnett, M. Orlowski, J. Mogab\",\"doi\":\"10.1109/IEDM.2005.1609525\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In this paper, moderately doped channel (MDC) multiple-FinFET is proposed and its electrical characteristics are investigated using 3D process and device, and 2D mixed-mode device and circuit simulation. It is shown that the MDC offers a better immunity to variations of the fin profile than the undoped channel for a short channel device, and Multiple-FinFET is critical for logic applications. The implementation of an asymmetrical doping profile further improves the performance of MDC Multiple-FinFET\",\"PeriodicalId\":13071,\"journal\":{\"name\":\"IEEE InternationalElectron Devices Meeting, 2005. IEDM Technical Digest.\",\"volume\":\"60 1\",\"pages\":\"976-979\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2005-12-05\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"7\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"IEEE InternationalElectron Devices Meeting, 2005. IEDM Technical Digest.\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/IEDM.2005.1609525\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"IEEE InternationalElectron Devices Meeting, 2005. IEDM Technical Digest.","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IEDM.2005.1609525","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Moderately doped channel multiple-finFET for logic applications
In this paper, moderately doped channel (MDC) multiple-FinFET is proposed and its electrical characteristics are investigated using 3D process and device, and 2D mixed-mode device and circuit simulation. It is shown that the MDC offers a better immunity to variations of the fin profile than the undoped channel for a short channel device, and Multiple-FinFET is critical for logic applications. The implementation of an asymmetrical doping profile further improves the performance of MDC Multiple-FinFET