横向CEFT逻辑性能在3nm节点的仿真研究

{"title":"横向CEFT逻辑性能在3nm节点的仿真研究","authors":"Guanguo Wen, Qiang Long, Xinlong Shi, Ying Wang, Feng Liu, Huiyong Hu, Jincheng Zhang","doi":"10.2139/ssrn.4377529","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":18617,"journal":{"name":"Microelectron. J.","volume":"6 1","pages":"105865"},"PeriodicalIF":0.0000,"publicationDate":"2023-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Simulation study of lateral CEFT logic performance at 3 nm Node\",\"authors\":\"Guanguo Wen, Qiang Long, Xinlong Shi, Ying Wang, Feng Liu, Huiyong Hu, Jincheng Zhang\",\"doi\":\"10.2139/ssrn.4377529\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":18617,\"journal\":{\"name\":\"Microelectron. J.\",\"volume\":\"6 1\",\"pages\":\"105865\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2023-07-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Microelectron. J.\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.2139/ssrn.4377529\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Microelectron. J.","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.2139/ssrn.4377529","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}