{"title":"二维辅助特征定位的研究","authors":"Liang Zhu, Barry Ma, Lin Shen, Kevin A. Beaudette","doi":"10.33079/jomm.20030104","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":66020,"journal":{"name":"微电子制造学报","volume":"1 1","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2019-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"A Study of 2D Assist Feature Placement\",\"authors\":\"Liang Zhu, Barry Ma, Lin Shen, Kevin A. Beaudette\",\"doi\":\"10.33079/jomm.20030104\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":66020,\"journal\":{\"name\":\"微电子制造学报\",\"volume\":\"1 1\",\"pages\":\"\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2019-01-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"微电子制造学报\",\"FirstCategoryId\":\"1089\",\"ListUrlMain\":\"https://doi.org/10.33079/jomm.20030104\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"微电子制造学报","FirstCategoryId":"1089","ListUrlMain":"https://doi.org/10.33079/jomm.20030104","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}