随机粗糙表面对互连中波传播的影响

L. Tsang, H. Braunisch, R. Ding, X. Gu
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引用次数: 52

摘要

为了解决印刷电路板(pcb)和微电子封装高速互连中的粗糙表面效应,我们研究了电磁波在粗糙表面环境中的传播。在我们的模型中,粗糙表面是一个具有相关函数或谱密度的随机过程。本文综述了基于该模型的解析理论、数值模拟和实验结果。我们描述了粗糙表面表征和从三维轮廓测量中提取粗糙度参数。我们首先研究了粗糙表面高度函数仅在一个水平方向上变化的二维情况,并考虑了平面波入射的情况。利用解析二阶小摄动法(SPM2)得到了吸收增强因子的简单封闭表达式。采用了数值传递矩阵法和矩量法。接下来,我们考虑粗糙表面高度在两个水平方向上变化的三维问题。我们还使用SPM2得到了增强因子的简单封闭形式表达式。在互连问题中,电磁波在导波环境中传播。因此,我们接下来考虑一个波导模型来研究随机粗糙度对波传播的影响,并与平面波公式的结果进行比较。采用解析SPM2法和模态匹配的数值有限元法(FEM)计算增强因子。本文还描述了实验结果及其与理论模型的相关性。最后,我们解释了增强因子概念如何在各种建模问题中直接包含粗糙表面效应。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Random Rough Surface Effects on Wave Propagation in Interconnects
To address the rough surface effects in high-speed interconnects on printed circuit boards (PCBs) and microelectronic packages, we study the electromagnetic wave propagation in a rough surface environment. In our model, the rough surface is characterized by a stochastic random process with correlation function or spectral density. This paper reviews the analytical theory, numerical simulations and experimental results based on such a model. We describe the rough surface characterization and the extraction of roughness parameters from 3D profile measurements. Initially we study the 2D case with the rough surface height function varying in only one horizontal direction and consider the case of plane wave incidence. Analytic second-order small perturbation method (SPM2) was used to obtain simple closed-form expressions for the absorption enhancement factor. The numerical transfer matrix (T-matrix) method and the method of moments (MoM) were also used. We next consider the case of the 3D problem with the rough surface height varying in both horizontal directions. We also used SPM2 to obtain a simple closed form expression for the enhancement factor. In interconnect problems, electromagnetic (EM) waves propagate in a guided wave environment. Thus, we next considered a waveguide model to study the effects of random roughness on wave propagation and compare with results from the plane wave formulation. Analytic SPM2 and numerical finite element method (FEM) with mode matching were used to obtain the enhancement factor. We also describe experimental results and correlation with the theoretical models. Finally, we explain how the enhancement factor concept used throughout lends itself to direct inclusion of rough surface effects in a wide variety of modeling problems.
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来源期刊
IEEE Transactions on Advanced Packaging
IEEE Transactions on Advanced Packaging 工程技术-材料科学:综合
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